PECVD in-situ growth of silicon quantum dots in silicon nitride from silane and nitrogen
2009 ◽
Vol 159-160
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pp. 77-79
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2009 ◽
Vol 159-160
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pp. 74-76
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1997 ◽
Vol 112
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pp. 75-81
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2009 ◽
Vol 129
(12)
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pp. 1744-1746
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2012 ◽
Vol 132
(9)
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pp. 2385-2389
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2017 ◽
Vol 718
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pp. 116-121
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2012 ◽
Vol 12
(2)
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pp. 1448-1452
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2009 ◽
Vol 9
(5)
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pp. 1112-1116
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2019 ◽
Vol 5
(1)
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Keyword(s):
Keyword(s):