Electrical properties of W delta doped Si epitaxial films grown on Si(100) by ultraclean low-pressure chemical vapor deposition
2005 ◽
Vol 8
(1-3)
◽
pp. 125-129
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Keyword(s):
2005 ◽
Vol 8
(1-3)
◽
pp. 121-124
◽
Keyword(s):
Keyword(s):
1998 ◽
Vol 189-190
◽
pp. 330-334
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Keyword(s):
1994 ◽
Vol 37-38
◽
pp. 305-310
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Keyword(s):
Keyword(s):
1986 ◽
Vol 15
(5)
◽
pp. 279-285
◽
1993 ◽
Vol 140
(9)
◽
pp. 2615-2621
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