ZnS thin film deposition on Silicon and glass substrates by Thermionic vacuum Arc

2012 ◽  
Vol 15 (2) ◽  
pp. 113-119 ◽  
Author(s):  
M. Özkan ◽  
N. Ekem ◽  
S. Pat ◽  
M.Z. Balbağ
Keyword(s):  
Thin Film ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Vacuum Arc ◽  
Glass Substrates ◽  
Thermionic Vacuum Arc

Two-dimensional BN-doped ZnO thin-film deposition by a thermionic vacuum arc system

2020 ◽  
Vol 31 (9) ◽  
pp. 6948-6955
Author(s):  
Mustafa Özgür ◽  
Suat Pat ◽  
Reza Mohammadigharehbagh ◽  
Uğur Demirkol ◽  
Nihan Akkurt ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Vacuum Arc ◽  
Zno Thin Film ◽  
Two Dimensional ◽  
Doped Zno ◽  
Thermionic Vacuum Arc

Thermionic vacuum arc (TVA) technique for magnesium thin film deposition

2010 ◽  
Vol 405 (16) ◽  
pp. 3276-3278 ◽  
Author(s):  
M.Z. Balbag ◽  
S. Pat ◽  
M. Ozkan ◽  
N. Ekem ◽  
G. Musa
Keyword(s):  
Thin Film ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Vacuum Arc ◽  
Thermionic Vacuum Arc

Al doped ZnO thin film deposition by thermionic vacuum arc

2018 ◽  
Vol 30 (1) ◽  
pp. 624-630 ◽  
Author(s):  
Mustafa Özgür ◽  
Suat Pat ◽  
Reza Mohammadigharehbagh ◽  
Caner Musaoğlu ◽  
Uğur Demirkol ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Vacuum Arc ◽  
Zno Thin Film ◽  
Doped Zno ◽  
Thermionic Vacuum Arc

Investigation of Al-doped CuO thin film deposition by the thermionic vacuum arc technique

2021 ◽  
pp. 1-6
Author(s):  
Suat Pat ◽  
Reza Mohammadigharehbagh ◽  
Caner Musaoglu ◽  
Soner Özen ◽  
Şadan Korkmaz
Keyword(s):  
Thin Film ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Vacuum Arc ◽  
Thermionic Vacuum Arc

scholarly journals Thermionic Vacuum Arc—A Versatile Technology for Thin Film Deposition and Its Applications

Coatings ◽  
2020 ◽  
Vol 10 (3) ◽  
pp. 211 ◽  
Author(s):  
Rodica Vladoiu ◽  
Milan Tichý ◽  
Aurelia Mandes ◽  
Virginia Dinca ◽  
Pavel Kudrna
Keyword(s):  
Thin Film ◽  
Arc Discharge ◽  
Adhesive Layer ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Hard Coatings ◽  
Vacuum Arc ◽  
Cathodic Arc Deposition ◽  
Solid State Batteries ◽  
Thermionic Vacuum Arc

This review summarizes the more-than-25-years of development of the so-called thermionic vacuum arc (TVA). TVA is an anodic arc discharge in vapors of the material to be deposited; the energy for its melting is delivered by means of a focused electron beam. The resulting material ions fall at the substrate where they form a well-adhesive layer; the ion energy is controllable. The deposited layers are, as a rule, free from droplets typical for cathodic arc deposition systems and the thermal stress of the substrates being coated is low. TVA is especially suitable for processing refractory metals, e.g., carbon or tungsten, however, in the course of time, various useful applications of this system originated. They include layers for fusion application, hard coatings, low-friction coatings, biomedical-applicable films, materials for optoelectronics, and for solid-state batteries. Apart from the diagnostic of the film properties, also the diagnostic of the TVA discharge itself as well as of the by TVA generated plasma was performed. The research and application of the TVA proceeds in broad international collaboration. At present, the TVA technology has found its firm place among the different procedures for thin film deposition.

Sn doped ZnO thin film deposition using thermionic vacuum arc technique

2019 ◽  
Vol 774 ◽  
pp. 1017-1023 ◽  
Author(s):  
Mustafa Özgür ◽  
Suat Pat ◽  
Reza Mohammadigharehbagh ◽  
Caner Musaoğlu ◽  
Uğur Demirkol ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Vacuum Arc ◽  
Zno Thin Film ◽  
Doped Zno ◽  
Thermionic Vacuum Arc

Investigation of the substrate effect for Zr doped ZnO thin film deposition by thermionic vacuum arc technique

2018 ◽  
Vol 29 (21) ◽  
pp. 18098-18104 ◽  
Author(s):  
Uğur Demirkol ◽  
Suat Pat ◽  
Reza Mohammadigharehbagh ◽  
Caner Musaoğlu ◽  
Mustafa Özgür ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Vacuum Arc ◽  
Substrate Effect ◽  
Zno Thin Film ◽  
Doped Zno ◽  
Thermionic Vacuum Arc

Boron thin film deposition by using Thermionic Vacuum Arc (TVA) technology

2007 ◽  
Vol 61 (1) ◽  
pp. 23-26 ◽  
Author(s):  
T. Akan ◽  
N. Ekem ◽  
S. Pat ◽  
U.G. Issever ◽  
M.Z. Balbag ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Vacuum Arc ◽  
Thermionic Vacuum Arc
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