Doping of InGaP epitaxial layers grown by low pressure metal-organic chemical vapor deposition

Materials Science and Engineering B ◽

10.1016/0921-5107(93)90192-p ◽

1993 ◽

Vol 19 (3) ◽

pp. 234-239 ◽

Author(s):

C.C. Wu ◽

K.C. Lin ◽

S.H. Chan ◽

M.S. Feng ◽

C.Y. Chang

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Low Pressure ◽

Organic Chemical ◽

Epitaxial Layers ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

Download Full-text

Microstructural analysis of InGaN/GaN epitaxial layers of metal organic chemical vapor deposition on c-plane of convex patterned sapphire substrate

Thin Solid Films ◽

10.1016/j.tsf.2013.05.111 ◽

2013 ◽

Vol 546 ◽

pp. 104-107 ◽

Author(s):

Zhixin Wan ◽

Yinsheng He ◽

Cheljong Choi ◽

Eunkyung Suh ◽

Young Moon Yu ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Sapphire Substrate ◽

Vapor Deposition ◽

Microstructural Analysis ◽

Chemical Vapor ◽

Organic Chemical ◽

Epitaxial Layers ◽

Patterned Sapphire Substrate ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

Download Full-text

Low pressure metal-organic chemical vapor deposition of InP/InAlAs/InGaAs quantum wires

Journal of Crystal Growth ◽

10.1016/s0022-0248(96)00612-4 ◽

1997 ◽

Vol 170 (1-4) ◽

pp. 590-594 ◽

Author(s):

M. Kappelt ◽

V. Türck ◽

M. Grundmann ◽

H. Cerva ◽

D. Bimberg

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Quantum Wires ◽

Chemical Vapor ◽

Low Pressure ◽

Organic Chemical ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

Download Full-text

Strain analysis of the GaN epitaxial layers grown on nitridated Si(111) substrate by metal organic chemical vapor deposition

Materials Science in Semiconductor Processing ◽

10.1016/j.mssp.2012.06.013 ◽

2013 ◽

Vol 16 (1) ◽

pp. 83-88 ◽

Author(s):

Mustafa K. Ozturk ◽

Engin Arslan ◽

İlknur Kars ◽

Suleyman Ozcelik ◽

Ekmel Ozbay

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Strain Analysis ◽

Chemical Vapor ◽

Organic Chemical ◽

Epitaxial Layers ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

Download Full-text

InP by Planar Reactive Deposition and GaAs by Low Pressure Metal Organic Chemical Vapor Deposition.

10.21236/ada099993 ◽

1981 ◽

Author(s):

K. Zanio

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Low Pressure ◽

Organic Chemical ◽

Reactive Deposition ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

Download Full-text

A quantum well δ-doped GaAs FET fabricated by low-pressure metal organic chemical vapor deposition

Solid-State Electronics ◽

10.1016/0038-1101(91)90139-p ◽

1991 ◽

Vol 34 (6) ◽

pp. 649-653 ◽

Author(s):

W.C. Hsu ◽

W. Lin ◽

C. Wang

Keyword(s):

Chemical Vapor Deposition ◽

Quantum Well ◽

Vapor Deposition ◽

Chemical Vapor ◽

Low Pressure ◽

Organic Chemical ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

Download Full-text

Cobalt oxide thin film low pressure metal-organic chemical vapor deposition

Thin Solid Films ◽

10.1016/j.tsf.2014.07.029 ◽

2014 ◽

Vol 567 ◽

pp. 8-13 ◽

Author(s):

Stefan Schmid ◽

René Hausbrand ◽

Wolfram Jaegermann

Keyword(s):

Thin Film ◽

Chemical Vapor Deposition ◽

Cobalt Oxide ◽

Vapor Deposition ◽

Chemical Vapor ◽

Low Pressure ◽

Oxide Thin Film ◽

Organic Chemical ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

Download Full-text

Low-Pressure Metal–Organic Chemical Vapor Deposition of Transparent and p-Type Conducting CuCrO2 Thin Films with High Conductivity

Chemical Vapor Deposition ◽

10.1002/cvde.200304147 ◽

2003 ◽

Vol 9 (5) ◽

pp. 238-240 ◽

Author(s):

S. Mahapatra ◽

S.A. Shivashankar

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Low Pressure ◽

High Conductivity ◽

Organic Chemical ◽

Metal Organic ◽

P Type ◽

Organic Chemical Vapor Deposition

Download Full-text

InAsSbP/InAsSb/InAs laser diodes (λ=3.2 μm) grown by low-pressure metal–organic chemical-vapor deposition

Applied Physics Letters ◽

10.1063/1.119298 ◽

1997 ◽

Vol 70 (1) ◽

pp. 40-42 ◽

Author(s):

J. Diaz ◽

H. Yi ◽

A. Rybaltowski ◽

B. Lane ◽

G. Lukas ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Laser Diodes ◽

Chemical Vapor ◽

Low Pressure ◽

Organic Chemical ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

Download Full-text

Three-step growth of metamorphic GaAs on Si(001) by low-pressure metal organic chemical vapor deposition

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

10.1116/1.4820914 ◽

2013 ◽

Vol 31 (5) ◽

pp. 051211 ◽

Author(s):

Yifan Wang ◽

Qi Wang ◽

Zhigang Jia ◽

Xiaoyi Li ◽

Can Deng ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Low Pressure ◽

Organic Chemical ◽

Metal Organic ◽

Step Growth ◽

Organic Chemical Vapor Deposition

Download Full-text

Synthesis of aluminium and gallium fluoroalkoxide compounds and the low pressure metal-organic chemical vapor deposition of gallium oxide films

Journal of Materials Chemistry ◽

10.1039/a808460b ◽

1999 ◽

Vol 9 (4) ◽

pp. 929-935 ◽

Author(s):

Liliana Mîinea ◽

Seigi Suh ◽

Simon G. Bott ◽

Jia-Rui Liu ◽

Wei-Kan Chu ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Gallium Oxide ◽

Oxide Films ◽

Chemical Vapor ◽

Low Pressure ◽

Organic Chemical ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

Download Full-text