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Photoluminescence of β-FeSi2 thin film prepared by ion beam sputter deposition method
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms
◽
10.1016/j.nimb.2005.08.175
◽
2006
◽
Vol 242
(1-2)
◽
pp. 673-675
◽
Cited By ~ 6
Author(s):
K. Shimura
◽
K. Yamaguchi
◽
H. Yamamoto
◽
M. Sasase
◽
S. Shamoto
◽
...
Keyword(s):
Thin Film
◽
Ion Beam
◽
Sputter Deposition
◽
Deposition Method
◽
Ion Beam Sputter Deposition
Download Full-text
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References
Sputter etching effect of the substrate on the microstructure of β-FeSi2 thin film prepared by ion beam sputter deposition method
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms
◽
10.1016/j.nimb.2007.01.041
◽
2007
◽
Vol 257
(1-2)
◽
pp. 186-189
◽
Cited By ~ 4
Author(s):
M. Sasase
◽
K. Shimura
◽
K. Yamaguchi
◽
H. Yamamoto
◽
S. Shamoto
◽
...
Keyword(s):
Thin Film
◽
Ion Beam
◽
Sputter Deposition
◽
Deposition Method
◽
Ion Beam Sputter Deposition
◽
Etching Effect
◽
Sputter Etching
Download Full-text
Effect of surface treatment of Si substrate on the crystal structure of FeSi2 thin film formed by ion beam sputter deposition method
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms
◽
10.1016/s0168-583x(03)00752-3
◽
2003
◽
Vol 206
◽
pp. 313-316
◽
Cited By ~ 16
Author(s):
M. Haraguchi
◽
H. Yamamoto
◽
K. Yamaguchi
◽
T. Nakanoya
◽
T. Saito
◽
...
Keyword(s):
Thin Film
◽
Crystal Structure
◽
Surface Treatment
◽
Ion Beam
◽
Sputter Deposition
◽
Deposition Method
◽
Si Substrate
◽
Ion Beam Sputter Deposition
◽
Effect Of Surface
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3D simulation of thin film growth conditions at ion beam sputter deposition and comparison to experimental investigations
10.1117/12.246794
◽
1996
◽
Author(s):
Markus Tilsch
◽
Volker Scheuer
◽
Jochen Biersack
◽
Theo T. Tschudi
Keyword(s):
Thin Film
◽
Film Growth
◽
Ion Beam
◽
Growth Conditions
◽
Sputter Deposition
◽
Thin Film Growth
◽
3D Simulation
◽
Experimental Investigations
◽
Ion Beam Sputter Deposition
Download Full-text
Characterization of nanocrystalline indium tin oxide thin films prepared by ion beam sputter deposition method
Thin Solid Films
◽
10.1016/j.tsf.2010.07.034
◽
2010
◽
Vol 518
(23)
◽
pp. 6891-6896
◽
Cited By ~ 11
Author(s):
S. Venkatachalam
◽
Hiroshi Nanjo
◽
Fathy M.B. Hassan
◽
Kazunori Kawasaki
◽
Mitsuhiro Kanakubo
◽
...
Keyword(s):
Thin Films
◽
Tin Oxide
◽
Indium Tin Oxide
◽
Ion Beam
◽
Sputter Deposition
◽
Deposition Method
◽
Oxide Thin Films
◽
Ion Beam Sputter Deposition
Download Full-text
Ion beam sputter deposition allows tailoring of thin film properties
Scilight
◽
10.1063/1.5086197
◽
2018
◽
Vol 2018
(51)
◽
pp. 510013
Author(s):
Chris Patrick
Keyword(s):
Thin Film
◽
Ion Beam
◽
Sputter Deposition
◽
Film Properties
◽
Ion Beam Sputter Deposition
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Effect of target compositions on the crystallinity of β-FeSi2 prepared by ion beam sputter deposition method
Thin Solid Films
◽
10.1016/j.tsf.2004.02.052
◽
2004
◽
Vol 461
(1)
◽
pp. 17-21
◽
Cited By ~ 5
Author(s):
K Yamaguchi
◽
A Heya
◽
K Shimura
◽
T Katsumata
◽
H Yamamoto
◽
...
Keyword(s):
Ion Beam
◽
Sputter Deposition
◽
Deposition Method
◽
Ion Beam Sputter Deposition
Download Full-text
Properties of Indium Tin Oxide Thin Films Deposited on Glass and Clay Substrates by Ion-Beam Sputter Deposition Method
Japanese Journal of Applied Physics
◽
10.7567/jjap.50.01ak03
◽
2011
◽
Vol 50
(1S1)
◽
pp. 01AK03
◽
Cited By ~ 2
Author(s):
Shanmugam Venkatachalam
◽
Hiroshi Nanjo
◽
Fathy M. B. Hassan
◽
Kazunori Kawasaki
◽
Yoshito Wakui
◽
...
Keyword(s):
Thin Films
◽
Tin Oxide
◽
Indium Tin Oxide
◽
Ion Beam
◽
Sputter Deposition
◽
Deposition Method
◽
Oxide Thin Films
◽
Ion Beam Sputter Deposition
Download Full-text
Properties of Indium Tin Oxide Thin Films Deposited on Glass and Clay Substrates by Ion-Beam Sputter Deposition Method
Japanese Journal of Applied Physics
◽
10.1143/jjap.50.01ak03
◽
2011
◽
Vol 50
◽
pp. 01AK03
◽
Cited By ~ 6
Author(s):
Shanmugam Venkatachalam
◽
Hiroshi Nanjo
◽
Fathy M. B. Hassan
◽
Kazunori Kawasaki
◽
Yoshito Wakui
◽
...
Keyword(s):
Thin Films
◽
Tin Oxide
◽
Indium Tin Oxide
◽
Ion Beam
◽
Sputter Deposition
◽
Deposition Method
◽
Oxide Thin Films
◽
Ion Beam Sputter Deposition
Download Full-text
Ion beam sputter deposition of thin film sensors for applications in highly loaded contacts
Thin Solid Films
◽
10.1016/0040-6090(89)90269-1
◽
1989
◽
Vol 182
(1-2)
◽
pp. 333-344
◽
Cited By ~ 5
Author(s):
E. Kagerer
◽
M.E. Königer
Keyword(s):
Thin Film
◽
Ion Beam
◽
Sputter Deposition
◽
Thin Film Sensors
◽
Ion Beam Sputter Deposition
◽
Highly Loaded
Download Full-text
Effect of Irradiation Atmospheres on the Film Growth of Iron Oxide on Si Substrate by Ion Beam Sputter Deposition Method
5th Asia-Pacific Conference on Semiconducting Silicides and Related Materials (APAC-Silicide 2019)
◽
10.7567/jjapcp.8.011201
◽
2020
◽
Author(s):
K. Yamanaka
◽
K. Yamaguchi
Keyword(s):
Iron Oxide
◽
Film Growth
◽
Ion Beam
◽
Sputter Deposition
◽
Deposition Method
◽
Si Substrate
◽
Ion Beam Sputter Deposition
Download Full-text
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