3D simulation of thin film growth conditions at ion beam sputter deposition and comparison to experimental investigations

1996 ◽  
Author(s):  
Markus Tilsch ◽  
Volker Scheuer ◽  
Jochen Biersack ◽  
Theo T. Tschudi
Keyword(s):  
Thin Film ◽  
Film Growth ◽  
Ion Beam ◽  
Growth Conditions ◽  
Sputter Deposition ◽  
Thin Film Growth ◽  
3D Simulation ◽  
Experimental Investigations ◽  
Ion Beam Sputter Deposition

Initial Stage of para-Hexaphenyl Thin-Film Growth Controlled by the Step Structure of the Ion-Beam-Modified TiO2(110) Surface

2019 ◽  
Vol 123 (33) ◽  
pp. 20257-20269 ◽  
Author(s):  
K. Szajna ◽  
M. Kratzer ◽  
W. Belza ◽  
A. Hinaut ◽  
D. Wrana ◽  
...  
Keyword(s):  
Thin Film ◽  
Film Growth ◽  
Ion Beam ◽  
Thin Film Growth ◽  
Step Structure ◽  
Initial Stage

Effects of Arylene Diimide Thin Film Growth Conditions on n-Channel OFET Performance

2008 ◽  
Vol 18 (8) ◽  
pp. 1329-1339 ◽  
Author(s):  
Brooks A. Jones ◽  
Antonio Facchetti ◽  
Michael R. Wasielewski ◽  
Tobin J. Marks
Keyword(s):  
Thin Film ◽  
Film Growth ◽  
Growth Conditions ◽  
Thin Film Growth

La1−xBaxMnOz thin film growth by ion beam sputtering: effects of oxygen partial pressure

2001 ◽  
Vol 229 (1-4) ◽  
pp. 415-418 ◽  
Author(s):  
M. Tada ◽  
J. Yamada ◽  
V.V. Srinivasu ◽  
V. Sreedevi ◽  
H. Kohmoto ◽  
...  
Keyword(s):  
Thin Film ◽  
Oxygen Partial Pressure ◽  
Partial Pressure ◽  
Film Growth ◽  
Ion Beam ◽  
Thin Film Growth ◽  
Ion Beam Sputtering ◽  
Beam Sputtering

MODELING OF THIN FILM GROWTH ON A TILTED MISCUT SUBSTRATE: STATISTICAL PROPERTIES AND THE OPTIMUM GROWTH CONDITIONS

2012 ◽  
Vol 26 (15) ◽  
pp. 1250087 ◽  
Author(s):  
PATCHA CHATRAPHORN ◽  
CHANAKAN CHOMNGAM
Keyword(s):  
Thin Film ◽  
Diffusion Length ◽  
Film Growth ◽  
Growth Conditions ◽  
Thin Film Growth ◽  
Vicinal Surface ◽  
Optimum Conditions ◽  
Step Flow ◽  
Step Flow Growth ◽  
Miscut Substrate

Most studies of thin film growth simulations are performed on flat substrates. However, in reality, a substrate is usually miscut leading to a vicinal surface with a small tilt. The goal of this work is to study effects of an initial configuration of a miscut substrate on the grown film. The Das Sarma–Tamborenea model with modified diffusion rules is used for the simulations. The modification is done to allow variation in the surface diffusion length and mobility of adatoms. The results show that the optimum conditions that lead to step-flow growth are long diffusion length and small step height.

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