First direct-write lithography results on the Guelph high resolution proton microprobe

For the electronic packaging of sensor stable and cost-efficient fine line printing technologies on LTCC and high frequency laminates are needed. Especially common technologies like screen printing and thin film techniques are unsuitable for fine structures or too expensive. In addition, there is no direct write technology for 3D LTCC designs as well as for high reliability cofiring structures. Closing this gap, aerosol printing technology is used to print high resolution conductors on planar and nonplanar substrates. Aerosol printing is a direct write noncontact printing technology of functional layers. After pneumatic atomization, the ink is transformed into 1–5 μm droplets. The resulting continuous aerosol stream is focused by a sheath gas in the printing head. Thus, the long standoff distance between the substrate and the deposition tip of max. 5 mm allows 3D printing on nonplanar substrates. With optimized inks and printing parameters, line widths of 10 μm are achievable. This paper will present applications for aerosol printed functional layers on LTCC. These are, for example, aerosol printed films embedded in cofired LTCC, fine line structures for high frequency applications, and the evaluation of printed 3D structures like LTCC stairways. Furthermore, the 90° contact of unconventional sensor designs will be presented.

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High-resolution direct-write multiphoton photolithography in poly(methylmethacrylate) films

Applied Physics Letters ◽

10.1063/1.2200476 ◽

2006 ◽

Vol 88 (18) ◽

pp. 184101 ◽

Cited By ~ 14

Author(s):

Daniel A. Higgins ◽

Thomas A. Everett ◽

Aifang Xie ◽

Sarah M. Forman ◽

Takashi Ito

Keyword(s):

High Resolution ◽

Direct Write

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High Resolution 3-D Laser Direct-Write Patterning

Conference on Lasers and Electro-Optics 2010 ◽

10.1364/cleo.2010.jtua1 ◽

2010 ◽

Author(s):

Linjie Li ◽

Rafael R. Gattass ◽

Michael Stocker ◽

Erez Gershgoren ◽

Hana Hwang ◽

...

Keyword(s):

High Resolution ◽

Direct Write ◽

Laser Direct Write

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High resolution imaging and elemental analysis of PAGE electrophoretograms by scanning proton microprobe

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/j.nimb.2009.03.061 ◽

2009 ◽

Vol 267 (12-13) ◽

pp. 2163-2166 ◽

Cited By ~ 4

Author(s):

Z. Szőkefalvi-Nagy ◽

A. Kocsonya ◽

I. Kovács ◽

D. Hopff ◽

S. Lüthje ◽

...

Keyword(s):

High Resolution ◽

Elemental Analysis ◽

High Resolution Imaging ◽

Proton Microprobe ◽

Scanning Proton Microprobe ◽

Resolution Imaging

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Evaluation of most recent chemically amplified resists for high resolution direct write using a Leica SB350 variable shaped beam writer

10.1117/12.655497 ◽

2006 ◽

Cited By ~ 2

Author(s):

Anatol Schwersenz ◽

Dirk Beyer ◽

Monika Boettcher ◽

Kang-Hoon Choi ◽

Ulrich Denker ◽

...

Keyword(s):

High Resolution ◽

Direct Write ◽

Shaped Beam ◽

Chemically Amplified ◽

Chemically Amplified Resists

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High resolution techniques for the scanning proton microprobe

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/0168-583x(91)95011-2 ◽

1991 ◽

Vol 56-57 ◽

pp. 717-721 ◽

Cited By ~ 6

Author(s):

A. Saint ◽

G.S. Bench ◽

M. Cholewa ◽

S. Dooley ◽

D.N. Jamieson ◽

...

Keyword(s):

High Resolution ◽

Proton Microprobe ◽

Scanning Proton Microprobe

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High resolution variable-shaped beam direct write

Microelectronic Engineering ◽

10.1016/j.mee.2007.01.049 ◽

2007 ◽

Vol 84 (5-8) ◽

pp. 774-778 ◽

Cited By ~ 17

Author(s):

Peter Hahmann ◽

Lutz Bettin ◽

Monika Boettcher ◽

Ulrich Denker ◽

Thomas Elster ◽

...

Keyword(s):

High Resolution ◽

Direct Write ◽

Shaped Beam

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Aerosol Printing of High Resolution Films for LTCC-Multilayer Components

Additional Conferences (Device Packaging HiTEC HiTEN & CICMT) ◽

10.4071/cicmt-2012-ta25 ◽

2012 ◽

Vol 2012 (CICMT) ◽

pp. 000071-000076 ◽

Cited By ~ 1

Author(s):

Martin Ihle ◽

Uwe Partsch ◽

Sindy Mosch ◽

Adrian Goldberg

Keyword(s):

High Resolution ◽

High Frequency ◽

High Reliability ◽

Direct Write ◽

Contact Printing ◽

Printing Technology ◽

Fine Line ◽

Aerosol Printing ◽

Cost Efficient ◽

Planar Substrates

For the electronic packaging of sensor stable and cost-efficient fine-line printing technologies on LTCC and high frequency laminates are needed. Especially common technologies like screen printing and thin film techniques are unsuitable for fine structures or too expensive. In addition there is no direct write technology for 3D-LTCC-designs as well as for high reliability Co-firing structures. Closing this gap the aerosol printing technology is used to print high resolution conductors on planar and non-planar substrates. Aerosol printing is a direct write non-contact printing technology of functional layers. After a pneumatic atomization the ink is transformed into 1 to 5 μm droplets. The resulting, continuous aerosol stream is focused by a sheath gas in the printing head. Thus the long standoff distance between substrate and deposition tip of max. 5 mm allows the 3D-printing on non-planar substrates. With optimized inks and printing parameters line widths of 10 μm are achievable. This paper will present applications for aerosol printed functional layers on LTCC. These are, for example, aerosol printed films embedded in co-fired LTCC, fine line structures for high frequency applications and the evaluation of printed 3D-structures like LTCC-stairways. Furthermore the 90 degree contacting of unconventional sensor designs will be presented.

Download Full-text