Effect of SHI irradiation and high temperature annealing on the microstructure of SiC implanted with Ag

Author(s):  
H.A.A. Abdelbagi ◽  
V.A. Skuratov ◽  
S.A. Adeojo ◽  
T.M. Mohlala ◽  
T.T. Hlatshwayo ◽  
...  
Author(s):  
P. Roitman ◽  
B. Cordts ◽  
S. Visitserngtrakul ◽  
S.J. Krause

Synthesis of a thin, buried dielectric layer to form a silicon-on-insulator (SOI) material by high dose oxygen implantation (SIMOX – Separation by IMplanted Oxygen) is becoming an important technology due to the advent of high current (200 mA) oxygen implanters. Recently, reductions in defect densities from 109 cm−2 down to 107 cm−2 or less have been reported. They were achieved with a final high temperature annealing step (1300°C – 1400°C) in conjunction with: a) high temperature implantation or; b) channeling implantation or; c) multiple cycle implantation. However, the processes and conditions for reduction and elimination of precipitates and defects during high temperature annealing are not well understood. In this work we have studied the effect of annealing temperature on defect and precipitate reduction for SIMOX samples which were processed first with high temperature, high current implantation followed by high temperature annealing.


Alloy Digest ◽  
1993 ◽  
Vol 42 (4) ◽  

Abstract Ferroperm is a soft magnetic alloy that contains 1% aluminum. This addition of aluminum combined with high-temperature annealing increases permeability and reduces coercivity without decreasing the high-saturation magnetization of pure iron. This datasheet provides information on composition, physical properties, elasticity, and tensile properties as well as fracture toughness. It also includes information on forming. Filing Code: FE-99. Producer or source: NKK Corporation.


2018 ◽  
Vol 42 (1) ◽  
pp. 149-158
Author(s):  
SHUANG XI ◽  
SHUANGSHUANG ZUO ◽  
YING LIU ◽  
YINLONG ZHU ◽  
YUTU YANG ◽  
...  

2020 ◽  
Vol 217 (14) ◽  
pp. 1900868 ◽  
Author(s):  
Shohei Teramura ◽  
Yuta Kawase ◽  
Yusuke Sakuragi ◽  
Sho Iwayama ◽  
Motoaki Iwaya ◽  
...  

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