Extending defect models for Si processing: The role of energy barriers for defect transformation, entropy and coalescence mechanism
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2016 ◽
Vol 6
(11)
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pp. 3984-3996
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2017 ◽
Vol 19
(3)
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pp. 2175-2185
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2019 ◽
Vol 124
(1)
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pp. 205-218
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2020 ◽
Vol 603
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pp. 117921
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2014 ◽
Vol 118
(40)
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pp. 9451-9459
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2017 ◽
Vol 5
(30)
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pp. 15891-15900
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