Silicon wafer surface patterning using femtosecond laser irradiation below ablation threshold

Alireza Dalili; Bo Tan; Krishnan Venkatakrishnan

doi:10.1016/j.optlaseng.2009.10.008

Silicon wafer surface patterning using femtosecond laser irradiation below ablation threshold

Optics and Lasers in Engineering ◽

10.1016/j.optlaseng.2009.10.008 ◽

2010 ◽

Vol 48 (3) ◽

pp. 346-353 ◽

Cited By ~ 15

Author(s):

Alireza Dalili ◽

Bo Tan ◽

Krishnan Venkatakrishnan

Keyword(s):

Femtosecond Laser ◽

Laser Irradiation ◽

Silicon Wafer ◽

Ablation Threshold ◽

Surface Patterning ◽

Femtosecond Laser Irradiation ◽

Wafer Surface ◽

Silicon Wafer Surface

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Research on Periodic Structures Aroused by Femtosecond Laser Irradiation on Single-Crystalline Silicon Wafer

Advances in Machining & Manufacturing Technology VIII - Key Engineering Materials ◽

10.4028/0-87849-999-7.779 ◽

2006 ◽

pp. 779-783

Author(s):

Yan Shen Wang ◽

Shen Dong ◽

Yan Qiang Yang ◽

Ying Chun Liang ◽

Y.H. Wang

Keyword(s):

Femtosecond Laser ◽

Laser Irradiation ◽

Silicon Wafer ◽

Crystalline Silicon ◽

Periodic Structures ◽

Femtosecond Laser Irradiation ◽

Single Crystalline Silicon ◽

Single Crystalline

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Surface patterning on nanocrystalline β-SiC thin film by femtosecond laser irradiation

Materials Letters ◽

10.1016/j.matlet.2019.02.004 ◽

2019 ◽

Vol 243 ◽

pp. 136-139

Author(s):

Mohan Kumar Kuntumalla ◽

Vadali V.S.S. Srikanth

Keyword(s):

Thin Film ◽

Femtosecond Laser ◽

Laser Irradiation ◽

Surface Patterning ◽

Femtosecond Laser Irradiation

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Plasma formation and structural modification below the visible ablation threshold in fused silica upon femtosecond laser irradiation

Applied Physics Letters ◽

10.1063/1.2766848 ◽

2007 ◽

Vol 91 (8) ◽

pp. 082902 ◽

Cited By ~ 44

Author(s):

J. Siegel ◽

D. Puerto ◽

W. Gawelda ◽

G. Bachelier ◽

J. Solis ◽

...

Keyword(s):

Femtosecond Laser ◽

Laser Irradiation ◽

Structural Modification ◽

Ablation Threshold ◽

Fused Silica ◽

Plasma Formation ◽

Femtosecond Laser Irradiation

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High integrity interconnection of silver submicron/nanoparticles on silicon wafer by femtosecond laser irradiation

Nanotechnology ◽

10.1088/0957-4484/26/2/025303 ◽

2014 ◽

Vol 26 (2) ◽

pp. 025303 ◽

Cited By ~ 5

Author(s):

H Huang ◽

M Sivayoganathan ◽

W W Duley ◽

Y Zhou

Keyword(s):

Femtosecond Laser ◽

Laser Irradiation ◽

Silicon Wafer ◽

Femtosecond Laser Irradiation ◽

High Integrity

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Transient plasma dynamics and structural changes below and above the ablation threshold in glasses upon femtosecond laser irradiation

2007 European Conference on Lasers and Electro-Optics and the International Quantum Electronics Conference ◽

10.1109/cleoe-iqec.2007.4386834 ◽

2007 ◽

Author(s):

J. Siegel ◽

D. Puerto ◽

J. Bonse ◽

G. Bachelier ◽

J. Solis

Keyword(s):

Femtosecond Laser ◽

Laser Irradiation ◽

Structural Changes ◽

Ablation Threshold ◽

Femtosecond Laser Irradiation ◽

Plasma Dynamics ◽

Transient Plasma

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The Acoustic Characteristic Investigation of Micro Plasma Shock Wave Obtained by Femtosecond Laser Ablation of Silicon Wafer Surface

MATEC Web of Conferences ◽

10.1051/matecconf/20166301019 ◽

2016 ◽

Vol 63 ◽

pp. 01019

Author(s):

Dong Zhong ◽

Zhong Ming Li ◽

Chun Chen ◽

Ruo Lin Ruan

Keyword(s):

Shock Wave ◽

Laser Ablation ◽

Femtosecond Laser ◽

Silicon Wafer ◽

Femtosecond Laser Ablation ◽

Acoustic Characteristic ◽

Wafer Surface ◽

Silicon Wafer Surface ◽

Plasma Shock Wave ◽

Plasma Shock

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Circular ripple formation on the silicon wafer surface after interaction with linearly polarized femtosecond laser pulses in air and water environments

Optical and Quantum Electronics ◽

10.1007/s11082-018-1562-5 ◽

2018 ◽

Vol 50 (7) ◽

Cited By ~ 6

Author(s):

Reza Goodarzi ◽

Fereshteh Hajiesmaeilbaigi

Keyword(s):

Femtosecond Laser ◽

Silicon Wafer ◽

Laser Pulses ◽

Femtosecond Laser Pulses ◽

Wafer Surface ◽

Ripple Formation ◽

Silicon Wafer Surface ◽

Linearly Polarized

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Erratum: “Plasma formation and structural modification below the visible ablation threshold in fused silica upon femtosecond laser irradiation” [Appl. Phys. Lett. 91, 082902 (2007)]

Applied Physics Letters ◽

10.1063/1.2929370 ◽

2008 ◽

Vol 92 (21) ◽

pp. 219901 ◽

Cited By ~ 6

Author(s):

D. Puerto ◽

W. Gawelda ◽

J. Siegel ◽

J. Solis ◽

J. Bonse

Keyword(s):

Femtosecond Laser ◽

Laser Irradiation ◽

Structural Modification ◽

Ablation Threshold ◽

Fused Silica ◽

Plasma Formation ◽

Femtosecond Laser Irradiation

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Self-organized fractal-like structures formation on the silicon wafer surface using the femtosecond laser pulses

Optics and Lasers in Engineering ◽

10.1016/j.optlaseng.2020.106008 ◽

2020 ◽

Vol 128 ◽

pp. 106008

Author(s):

R. Goodarzi ◽

F. Hajiesmaeilbaigi ◽

E. Bostandoost

Keyword(s):

Femtosecond Laser ◽

Silicon Wafer ◽

Laser Pulses ◽

Femtosecond Laser Pulses ◽

Wafer Surface ◽

Self Organized ◽

Silicon Wafer Surface

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Uniform Surface Patterning with Two-Dimensional Gold Nanoparticle Array Excited by Oblique Femtosecond Laser Irradiation

Japanese Journal of Applied Physics ◽

10.1143/jjap.49.055001 ◽

2010 ◽

Vol 49 (5) ◽

pp. 055001 ◽

Cited By ~ 7

Author(s):

Tomoya Miyanishi ◽

Yuto Tanaka ◽

Mitsuhiro Terakawa ◽

Minoru Obara

Keyword(s):

Femtosecond Laser ◽

Laser Irradiation ◽

Gold Nanoparticle ◽

Surface Patterning ◽

Femtosecond Laser Irradiation ◽

Nanoparticle Array ◽

Two Dimensional

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