Effect of acoustic waves on the repetition frequency of high repetition rate TEA-CO2 lasers and calculating optimization condition

2010 ◽  
Vol 42 (5) ◽  
pp. 710-715 ◽  
Author(s):  
H.R. Baghshahi ◽  
M. Rahimi
Keyword(s):  
Repetition Rate ◽  
Acoustic Waves ◽  
High Repetition Rate ◽  
Repetition Frequency ◽  
Co2 Lasers ◽  
High Repetition

High-Power, High-Repetition-Rate Pulsed CO2 Lasers and their application in EUV lithography sources

2016 ◽  
Author(s):  
Yezheng Tao ◽  
Alex Schafgans ◽  
Slava Rokitski ◽  
Michael Kats ◽  
Jayson Stewart ◽  
...  
Keyword(s):  
High Power ◽  
Repetition Rate ◽  
High Repetition Rate ◽  
Co2 Lasers ◽  
High Repetition ◽  
Euv Lithography
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