Characterization of sol gel Zn1-xCaxO thin layers deposited on p-Si substrate by spin-coating method

The potential of thin layer in many applications has led to research on the development of many new materials and their fabrication methods. This study aimed to synthesize a thin layer of ZnO using the facile and low-cost sol-gel spin coating method. The ZnO thin layer is deposited on a glass substrate and analyzed to observe the influence of the deposition variables such as heating and rotation speed, and its aging. The characterization methods include the identification of the formed phase using X-Ray Diffractometer (XRD), and the microstructure and elemental composition using Scanning Electron Microscopy (SEM) coupled with EDS (Energy Dispersive Spectrometer). The study shows that a thin layer of ZnO is successfully deposited on a glass substrate by heat treatment at temperatures of 300 oC and 500 oC. Furthermore, XRD reveals that higher heating temperatures result in higher diffraction peak intensity. At a heating temperature of 300 °C crystals are formed but are not yet perfectly oriented, while they are at 500 °C. On the other hand, higher spin coating rotation speed gives rise to lower intensity of diffraction peak. The ZnO crystallization is easier to form in the coating process with a lower rotation (1500 rpm). Interestingly, the thin layer is stable over time where there is no significant change in each sample, both in terms of intensity and width of the ZnO crystal peak. The results indicate that gel precursor aged less than two days can form ZnO crystals. Finally, SEM results show that the surface morphology of the ZnO layer heated at 500 oC has an average grain size of 300 nm. Based on the cross-sectional results of SEM shows that the higher the coating rotation speed has resulted the thinner of the ZnO layer, where the thickness of the resulting layer is on order >5 mm.

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Synthesis of SnO2 Thin Layer with a Doping Fluorine by Sol-Gel Spin Coating Method

Jurnal Penelitian Pendidikan IPA ◽

10.29303/jppipa.v5i2.257 ◽

2019 ◽

Vol 5 (2) ◽

pp. 175 ◽

Cited By ~ 4

Author(s):

Lalu Muliyadi ◽

Aris Doyan ◽

Susilawati Susilawati ◽

Syamsul Hakim

Keyword(s):

Thin Film ◽

Thin Layer ◽

Tin Oxide ◽

Spin Coating ◽

Sol Gel ◽

Thin Layers ◽

Basic Material ◽

Spin Coating Method ◽

Number Of Layers ◽

Coating Method

A thin layer of tin oxide with doping Fluorine was synthesized using the sol-gel spin coating method. The synthesis aims to determine the quality of thin layers formed based on temperature variations and the number of layers. The basic material used is SnCl2.2H2O, while the doping material used is NH4F with variations in concentrations of dopants 0, 5, 10, 15, 20 and 25%. The substrate used is glass with a size of 10 x 10 x 3 mm. The synthesis of the thin layer includes substrate preparation, sol-gel making, thin film making, and heating process. At this stage SnO2:F is deposited on a glass substrate with sol-gel spin coating technique at the concentration of sol 1 M with doping levels of Fluorine 0, 5, 10, 15, 20 and 25%, and treated with maturation for 24 hours. Making a thin layer using a spin coater at a speed of 2000 rpm for 3 minutes. The layer made consists of one layer, two layers, three layers and four layers. The resulting layer shows that the higher the doping percentage, the higher the transparency of the layer. In addition, the more the number of layers, the lower the transparency level. Keywords: Thin Film, Tin Oxide, Fluorine, Sol-gel, Spin Coating

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Fabrication and characterization of a diluted magnetic semiconducting TM co-doped Al:ZnO (TM=Co, Ni) thin films by sol–gel spin coating method

Spectrochimica Acta Part A Molecular and Biomolecular Spectroscopy ◽

10.1016/j.saa.2013.01.017 ◽

2013 ◽

Vol 106 ◽

pp. 118-123 ◽

Cited By ~ 12

Author(s):

R. Siddheswaran ◽

R.V. Mangalaraja ◽

Eduardo P. Tijerina ◽

J.-Luis Menchaca ◽

M.F. Meléndrez ◽

...

Keyword(s):

Thin Films ◽

Spin Coating ◽

Sol Gel ◽

Spin Coating Method ◽

Coating Method ◽

Fabrication And Characterization ◽

Diluted Magnetic ◽

Co Doped

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Study of Zinc Oxide Films on SiO2/Si Substrate by Sol–Gel Spin Coating Method for pH Measurement

Applied Mechanics and Materials ◽

10.4028/www.scientific.net/amm.284-287.347 ◽

2013 ◽

Vol 284-287 ◽

pp. 347-351 ◽

Cited By ~ 10

Author(s):

Kai Loong Foo ◽

Muhammad Kashif ◽

Uda Hashim

Keyword(s):

Zinc Oxide ◽

Spin Coating ◽

Sol Gel ◽

Oxide Films ◽

Ph Measurement ◽

Oxide Thin Film ◽

Si Substrate ◽

Spin Coating Method ◽

Zinc Oxide Films ◽

Coating Method

This In this work, zinc oxide film was deposited onto the SiO2/Si substrate with low-cost sol-gel spin coating method. Zinc oxide thin film was deposited on the silver interdigit elctrodes for the pH measurement. The surface morphology and microstructures of the deposited zinc oxide films were analyzed by field emission scanning electron microscope (FESEM) and atomic force microscope (AFM). Whereas the crystallinity and structure of the zinc oxide films were determined by X-ray diffraction (XRD) and Fourier transform infrared spectroscopy (FTIR). The measurement at various pH values, which were ±1 above and below of the neutral pH had been conducted with a real time dielectric analyzer measurement. It was observed that the increase in pH would decrease the capacitance of the device.

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