Plasmon-assisted optical critical dimension measurement for three-layer orthogonal metallic gratings
2021 ◽
pp. 100949
2012 ◽
Vol 21
(3)
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pp. 033028-1
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2014 ◽
Vol 23
(1)
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pp. 013001
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2006 ◽
Vol 45
(7)
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pp. 5928-5932
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Keyword(s):
Keyword(s):
2015 ◽
Vol 16
(9)
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pp. 1941-1947
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Keyword(s):