On the effects of air-exposure-time and time-dependency of Pb/p-Si Schottky diodes

2010 ◽  
Vol 405 (21) ◽  
pp. 4480-4487 ◽  
Author(s):  
H.A. Çetinkara ◽  
H.S. Güder
2019 ◽  
Vol 27 (4) ◽  
pp. 267-277
Author(s):  
Suong Tuyet Thi Ha ◽  
Minjung Kwon ◽  
Toan Khac Nguyen ◽  
Jin-Hee Lim

1996 ◽  
Vol 443 ◽  
Author(s):  
Seoghyeong Lee ◽  
Jae-Yoon Yoo ◽  
Jong-Wan Park

AbstractThe reliability of SiOF films for intermetal dielectrics in multilevel interconnections of ULSIs is investigated. SiOF films were deposited by ECRCVD using H-free source gases, i.e., SiF4 and O2. The effect of post plasma treatment on the moisture absorption and dielectric properties of SiOF films were carried out in terms of air exposure time. The reliability test of Cu / TiN / SiOF / Si specimen was carried out in terms of temperatures by RTA in N2 ambient. After O2 plasma treatment, no appreciable peak directly related to moisture absorption was detected. The C-V characteristics of the O2 plasma treated SiOF film showed that the film remained to hold the sound dielectric properties even after boiling treatment. The Cu / TiN / SiOF / Si system was found to be reliable up to 600 °C.


1999 ◽  
Vol 6 (1) ◽  
pp. 89-94 ◽  
Author(s):  
H. A. Çetinkara ◽  
M. Sağlam ◽  
A. Türüt ◽  
N. Yalçın

2003 ◽  
Vol 80 (7) ◽  
pp. 685-695 ◽  
Author(s):  
Maurizio Servili ◽  
Roberto Selvaggini ◽  
Agnese Taticchi ◽  
Sonia Esposto ◽  
Gianfrancesco Montedoro

2018 ◽  
Vol 25 (01) ◽  
pp. 1850043
Author(s):  
A. KORKUT

It is well known that the semiconductor surface is easily oxidized by air-media in time. This work studieds the characterization of Schottky diodes and changes in depletion capacitance, which is caused by air exposure of a group of Cu/n-Si/Al Schottky diodes. First, data for current-voltage and capacitance-voltage were a Ren, and then ideality factor, barrier height, built-in potential ([Formula: see text], donor concentration and Fermi level, interfacial oxide thickness, interface state density were calculated. It is seen that depletion capacitance was calculate; whereafter built-in potential played an important role in Schottky diodes characteristic. Built-in potential directly affects the characteristic of Schottky diodes and a turning point occurs. In case of forward and reverse bias, depletion capacitance versus voltage graphics are matched, but in an opposite direction. In case of forward bias, differential depletion capacitance begins from minus values, it is raised to first [Formula: see text], then reduced to second [Formula: see text] under the minus condition. And it sharply gones up to positive apex, then sharply falls down to near zero, but it takes positive values depending on DC voltage. In case of reverse bias, differential depletion capacitance takes to small positive values. In other respects, we see that depletion characteristics change considerably under DC voltage.


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