scholarly journals Fabrication of tactile sensor array using microcantilever with low-TCR nickel-chromium alloy thin film for slippage detection

2011 ◽  
Vol 25 ◽  
pp. 627-630 ◽  
Author(s):  
M. Sohgawa ◽  
D. Hirashima ◽  
Y. Moriguchi ◽  
T. Uematsu ◽  
W. Mito ◽  
...  
Keyword(s):  
Thin Film ◽  
Sensor Array ◽  
Tactile Sensor ◽  
Alloy Thin Film ◽  
Chromium Alloy ◽  
Nickel Chromium ◽  
Tactile Sensor Array ◽  
Slippage Detection

2A2-O12 Rotational Slippage Detection Using Micro Cantilever Type Tactile Sensor Array(Tactile and Force Sensing (1))

2011 ◽  
Vol 2011 (0) ◽  
pp. _2A2-O12_1-_2A2-O12_3
Author(s):  
Wataru MITO ◽  
Tatsuya UEMATSU ◽  
Hirotake YAMAZOE ◽  
Masahiro TADA ◽  
Masayuki SOHGAWA ◽  
...  
Keyword(s):  
Sensor Array ◽  
Tactile Sensor ◽  
Force Sensing ◽  
Tactile Sensor Array ◽  
Micro Cantilever ◽  
Slippage Detection

scholarly journals Thermal Analysis of Energy Storage Capacity According to Thickness of Nickel/Chromium Alloy Layer

Energies ◽  
2021 ◽  
Vol 14 (11) ◽  
pp. 3217
Author(s):  
Yonghyeon Kim ◽  
Hyeokjoo Choi ◽  
Seokhun Kwon ◽  
Seokwon Lee ◽  
Hyunil Kang ◽  
...  
Keyword(s):  
Thin Film ◽  
Storage Capacity ◽  
Infrared Camera ◽  
Rf Magnetron Sputtering ◽  
Alloy Layer ◽  
Alloy Thin Film ◽  
Chromium Alloy ◽  
Rf Power ◽  
Nickel Chromium ◽  
Sputtering System

This paper examines a microconstruction consisting of nickel (Ni)/chromium (Cr) alloy thin-film. The total length of the microconstruction was 28 mm, the width was 0.2 mm, and the height was designed to be 1 μm. A thin-film of Ni/Cr alloy was co-sputtered on a silicon dioxide wafer patterned with photoresist via a RF magnetron sputtering system. The RF power ratios applied to the 4 inch target of Ni and Cr were 300 W:100 W (3:1), 300 W:150 W (2:1), and 150 W:150 W (1:1). The electrical resistance of the manufactured microconstruction was calculated and measured through Hall measurements. The temperature generated by applying 1–10 V to the microconstruction electrode was observed by using an infrared camera, and was summarized using a linear equation according to the power applied to each sample.

A flexible field-limited ordered ZnO nanorod-based self-powered tactile sensor array for electronic skin

Nanoscale ◽  
2016 ◽  
Vol 8 (36) ◽  
pp. 16302-16306 ◽  
Author(s):  
W. Deng ◽  
L. Jin ◽  
B. Zhang ◽  
Y. Chen ◽  
L. Mao ◽  
...  
Keyword(s):  
Sensor Array ◽  
Tactile Sensor ◽  
Zno Nanorod ◽  
Electronic Skin ◽  
Tactile Sensor Array ◽  
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