scholarly journals A Tunable Palladium-based Capacitive MEMS Hydrogen Sensor Performing High Dynamics, High Selectivity and Ultra-low Power Sensing

2014 ◽  
Vol 87 ◽  
pp. 268-271 ◽  
Author(s):  
Thomas Walewyns ◽  
David Spirito ◽  
Laurent A. Francis
Author(s):  
Zhiqiang Wei ◽  
Kazunari Homma ◽  
Koji Katayama ◽  
Ken Kawai ◽  
Satoru Fujii ◽  
...  

2019 ◽  
Vol 102 (3) ◽  
pp. 70-77 ◽  
Author(s):  
Hiroaki Yamazaki ◽  
Yumi Hayashi ◽  
Kei Masunishi ◽  
Daiki Ono ◽  
Tamio Ikehashi

2011 ◽  
Vol 08 (02) ◽  
pp. 153-159 ◽  
Author(s):  
JUAN SANTANA ◽  
RICHARD VAN DEN HOVEN

A capacitive MEMS Ultra-Low-Power readout for accelerometers and strain sensors using VerilogA models is presented. The VerilogA model of the accelerometers and strain sensors allows the simulation of a system in a half-bridge configuration. The gain of the system is controlled by integrating pulses from the excitation voltage which accurately controls the Signal-to-Noise ratio. A Figure-of-Merit of [Formula: see text] was achieved for a sensor range of ±2.0 g and ±20,000 με over a 100 Hz bandwidth. Residual motion artefacts are also canceled by the system.


2016 ◽  
Vol 136 (11) ◽  
pp. 1555-1566 ◽  
Author(s):  
Jun Fujiwara ◽  
Hiroshi Harada ◽  
Takuya Kawata ◽  
Kentaro Sakamoto ◽  
Sota Tsuchiya ◽  
...  

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