A Tunable Palladium-based Capacitive MEMS Hydrogen Sensor Performing High Dynamics, High Selectivity and Ultra-low Power Sensing
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2018 ◽
Vol 138
(7)
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pp. 312-318
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2019 ◽
Vol 102
(3)
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pp. 70-77
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2011 ◽
Vol 08
(02)
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pp. 153-159
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2016 ◽
Vol 136
(11)
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pp. 1555-1566
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