Wireless passive pressure sensor based on sapphire direct bonding for harsh environments

2018 ◽  
Vol 280 ◽  
pp. 406-412 ◽  
Author(s):  
Wangwang Li ◽  
Ting Liang ◽  
Wenyi Liu ◽  
Pinggang Jia ◽  
Yulei Chen ◽  
...  
Sensors ◽  
2018 ◽  
Vol 18 (8) ◽  
pp. 2676
Author(s):  
Chen Li ◽  
Boshan Sun ◽  
Yanan Xue ◽  
Jijun Xiong

Alumina ceramic is a highly promising material for fabricating high-temperature pressure sensors. In this paper, a direct bonding method for fabricating a sensitive cavity with alumina ceramic is presented. Alumina ceramic substrates were bonded together to form a sensitive cavity for high-temperature pressure environments. The device can sense pressure parameters at high temperatures. To verify the sensitivity performance of the fabrication method in high-temperature environments, an inductor and capacitor were integrated on the ceramic substrate with the fabricated sensitive cavity to form a wireless passive LC pressure sensor with thick-film integrated technology. Finally, the fabricated sensor was tested using a system test platform. The experimental results show that the sensor can realize pressure measurements above 900 °C, confirming that the fabricated sensitive cavity has excellent sealing properties. Therefore, the direct bonding method can potentially be used for developing all-ceramic high-temperature pressure sensors for application in harsh environments.


Sensors ◽  
2013 ◽  
Vol 13 (8) ◽  
pp. 9896-9908 ◽  
Author(s):  
Qiulin Tan ◽  
Hao Kang ◽  
Jijun Xiong ◽  
Li Qin ◽  
Wendong Zhang ◽  
...  

2014 ◽  
Vol 2014 ◽  
pp. 1-6 ◽  
Author(s):  
Qiulin Tan ◽  
Mingliang Yang ◽  
Tao Luo ◽  
Wei Liu ◽  
Chao Li ◽  
...  

A novel passive wireless pressure sensor is proposed based on LTCC (low temperature cofired ceramic) technology. The sensor employs a passive LC circuit, which is composed of a variable interdigital capacitor and a constant inductor. The inductor and capacitor were fabricated by screen-printing. Pressure measurement is tested using a wireless mutual inductance coupling method. The experimental sensitivity of the sensor is about 273.95 kHz/bar below 2 bar. Experimental results show that the sensor can be read out wirelessly by external antenna at 600°C. The max readout distance is 3 cm at room temperature. The sensors described can be applied for monitoring of gas pressure in harsh environments, such as environment with high temperature and chemical corrosion.


2014 ◽  
Vol 4 (4) ◽  
pp. 359-365 ◽  
Author(s):  
Yingping Hong ◽  
Tingli Zheng ◽  
Ting Liang ◽  
Qun Cao ◽  
Hairui Zhang ◽  
...  

2000 ◽  
Vol 83 (1-3) ◽  
pp. 30-33 ◽  
Author(s):  
S.T Moe ◽  
K Schjølberg-Henriksen ◽  
D.T Wang ◽  
E Lund ◽  
J Nysæther ◽  
...  

2018 ◽  
Vol 27 (1) ◽  
pp. 73-85 ◽  
Author(s):  
John E. Rogers ◽  
Yong-Kyu Yoon ◽  
Mark Sheplak ◽  
Jack W. Judy

2021 ◽  
Author(s):  
Meiling Jia ◽  
Chenghan Yi ◽  
Yankun Han ◽  
Xin Li ◽  
Guoliang Xu ◽  
...  

Abstract Thin, lightweight, and flexible textile pressure sensors with the ability to precisely detect the full range of faint pressure (< 100 Pa), low pressure (in the range of KPa) and high pressure (in the range of MPa) are in significant demand to meet the requirements for applications in daily activities and more meaningfully in some harsh environments, such as high temperature and high pressure. However, it is still a major challenge to fulfill these requirements simultaneously in a single pressure sensor. Herein, a high-performance pressure sensor enabled by polyimide fiber fabric with functionalized carbon-nanotube (PI/FCNT) is obtained via a facile electrophoretic deposition (EPD) approach. High-density FCNT is evenly wrapped and chemically bonded to the fiber surface during the EPD process, forming a conductive hierarchical fiber/FCNT matrix. Benefiting from the abundant yet firm contacting points, point-to-point contacting mode, and high elastic modulus of both PI and CNT, the proposed PI/FCNT pressure sensor exhibits ultra-high sensitivity (3.57 MPa− 1), ultra-wide linearity (3.24 MPa), exceptionally broad sensing range (~ 45 MPa), and long-term stability (> 4000 cycles). Furthermore, under a high working temperature of 200 ºC, the proposed sensor device still shows an ultra-high sensitivity of 2.64 MPa− 1 within a wide linear range of 7.2 MPa, attributing to its intrinsic high-temperature-resistant properties of PI and CNT. Thanks to these merits, the proposed PI/FCNT(EPD) pressure sensor could serve as an E-skin device to monitor the human physiological information, precisely detect tiny and extremely high pressure, and can be integrated into an intelligent mechanical hand to detect the contact force under high-temperature (> 300 ºC), endowing it with high applicability in the fields of real-time health monitoring, intelligent robots, and harsh environments.


Author(s):  
Scott C. Moulzolf ◽  
Roby Behanan ◽  
Robert J. Lad ◽  
Mauricio Pereira da Cunha

2001 ◽  
Vol 91 (1-2) ◽  
pp. 51-56 ◽  
Author(s):  
B.M Dutoit ◽  
Y Pilloud ◽  
F Elegibili ◽  
P.-A Besse ◽  
R.S Popovic

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