Resonant micro-accelerometers have good properties such as the large dynamic range, the high sensitivity, the strong anti-interference ability as well as the direct digital output. A new z-axis resonant micro-accelerometer based on electrostatic stiffness is researched. The new z-axis resonant micro-accelerometer consists of a torsional accelerometer and two plane resonators. The sensing movement of the accelerometer is decoupled with oscillation of the plane resonators by electrostatic stiffness, which will benefit to improve the performance of the new z-axis resonant micro-accelerometer. The new structure is designed. The sensitive theory of the acceleration is investigated and the equation of scale factor is deduced under ideal conditions. The simulation is implemented to verify the basic principle by the Ansys and Matlab. The structure simulation results prove that the effective frequency of the torsional accelerometer and the resonator are 0.66kHz and 13.3kHz separately. And the interference modes are isolated with the effective mode apparently. The system simulation results indicate that the scale factor is 37Hz/g and the system has excellent capabilities in locking and tracking natural frequency of resonators, which proves that the basic theory is feasible.
High-sensitivity and large-dynamic-range refractive index sensors employing weak composite Fabry–Perot cavities
