The Design and Simulation of a New Z-Axis Resonant Micro-Accelerometer Based on Electrostatic Stiffness

2013 ◽  
Vol 744 ◽  
pp. 478-483
Author(s):  
Bo Yang ◽  
Bo Dai ◽  
Hui Zhao
Keyword(s):  
Dynamic Range ◽  
System Simulation ◽  
High Sensitivity ◽  
Scale Factor ◽  
Effective Frequency ◽  
Large Dynamic Range ◽  
Digital Output ◽  
Structure Simulation ◽  
Simulation Results ◽  
Micro Accelerometer

Resonant micro-accelerometers have good properties such as the large dynamic range, the high sensitivity, the strong anti-interference ability as well as the direct digital output. A new z-axis resonant micro-accelerometer based on electrostatic stiffness is researched. The new z-axis resonant micro-accelerometer consists of a torsional accelerometer and two plane resonators. The sensing movement of the accelerometer is decoupled with oscillation of the plane resonators by electrostatic stiffness, which will benefit to improve the performance of the new z-axis resonant micro-accelerometer. The new structure is designed. The sensitive theory of the acceleration is investigated and the equation of scale factor is deduced under ideal conditions. The simulation is implemented to verify the basic principle by the Ansys and Matlab. The structure simulation results prove that the effective frequency of the torsional accelerometer and the resonator are 0.66kHz and 13.3kHz separately. And the interference modes are isolated with the effective mode apparently. The system simulation results indicate that the scale factor is 37Hz/g and the system has excellent capabilities in locking and tracking natural frequency of resonators, which proves that the basic theory is feasible.

The Design of a New Biaxial Decoupled Resonant Micro-Accelerometer

2013 ◽  
Vol 744 ◽  
pp. 466-469 ◽  
Author(s):  
Bo Yang ◽  
Hui Zhao ◽  
Bo Dai
Keyword(s):  
Basic Principle ◽  
Proof Mass ◽  
Mutual Interference ◽  
Scale Factor ◽  
Output Characteristic ◽  
Input Output ◽  
Simulation Results ◽  
Resonator Modes ◽  
Micro Accelerometer

A new biaxial decoupled resonant micro-accelerometer is researched. The new biaxial resonant micro-accelerometer consists of four same tuning forking resonators, four pair of decoupled beams, four lever mechanisms and a proof mass. The decoupling between two orthogonal axes is realized by the decoupling beams, which will benefit to isolate two axes acceleration detection. The simulation is implemented to verify the basic principle by the Ansys. The simulation results prove that the effective frequencies of two acceleration sensitive modes are 3.699 kHz and 3.718 kHz separately. Two pair of resonator modes which are 23.893 kHz, 23.946 kHz, 26.974 kHz and 26.999 kHz separately have about 3kHz difference in frequency in order to prevent the mutual interference. And the interference modes are isolated with effective mode apparently. The input-output characteristic simulation results indicate the y-axis scale factor is 57.1Hz/g and the coupling output in the x-axis is 0.0148Hz/g, while the x-axis scale factor is 56.1Hz/g and the coupling output in the y-axis is 0.0073Hz/g, which proves that the new biaxial resonant micro-accelerometer is practicable and has an excellent decoupled performance.

Rapid, targeted and culture-free viral infectivity assay in drop-based microfluidics

Lab on a Chip ◽  
2015 ◽  
Vol 15 (19) ◽  
pp. 3934-3940 ◽  
Author(s):  
Ye Tao ◽  
Assaf Rotem ◽  
Huidan Zhang ◽  
Connie B. Chang ◽  
Anindita Basu ◽  
...  
Keyword(s):  
High Throughput ◽  
Dynamic Range ◽  
High Sensitivity ◽  
Cost Effective ◽  
Serial Dilution ◽  
Viral Infectivity ◽  
Large Dynamic Range ◽  
Infectivity Assay ◽  
Dilution Experiments

We developed a rapid, targeted and culture-free infectivity assay using high-throughput drop-based microfluidics. The high sensitivity and large dynamic range of our cost effective assay alleviates the need for serial dilution experiments.

scholarly journals Theoretical Analysis of a Microring Resonator Array with High Sensitivity and Large Dynamic Range Based on a Multi-Scale Technique

Sensors ◽  
2018 ◽  
Vol 18 (7) ◽  
pp. 1987
Author(s):  
Wenqin Mo ◽  
Huiyun Liu ◽  
Fang Jin ◽  
Junlei Song ◽  
Kaifeng Dong
Keyword(s):  
Theoretical Analysis ◽  
Dynamic Range ◽  
High Sensitivity ◽  
Microring Resonator ◽  
Large Dynamic Range ◽  
Multi Scale

scholarly journals A high-sensitivity MEMS gravimeter with a large dynamic range

2019 ◽  
Vol 5 (1) ◽  
Author(s):  
Shihao Tang ◽  
Huafeng Liu ◽  
Shitao Yan ◽  
Xiaochao Xu ◽  
Wenjie Wu ◽  
...  
Keyword(s):  
Dynamic Range ◽  
High Sensitivity ◽  
Superconducting Gravimeter ◽  
Displacement Transducer ◽  
Earth Tides ◽  
High Mass ◽  
Gravitational Acceleration ◽  
Large Dynamic Range ◽  
Optical Displacement ◽  
Mems Technology

Abstract Precise measurement of variations in the local gravitational acceleration is valuable for natural hazard forecasting, prospecting, and geophysical studies. Common issues of the present gravimetry technologies include their high cost, high mass, and large volume, which can potentially be solved by micro-electromechanical-system (MEMS) technology. However, the reported MEMS gravimeter does not have a high sensitivity and a large dynamic range comparable with those of the present commercial gravimeters, lowering its practicability and ruling out worldwide deployment. In this paper, we introduce a more practical MEMS gravimeter that has a higher sensitivity of 8 μGal/√Hz and a larger dynamic range of 8000 mGal by using an advanced suspension design and a customized optical displacement transducer. The proposed MEMS gravimeter has performed the co-site earth tides measurement with a commercial superconducting gravimeter GWR iGrav with the results showing a correlation coefficient of 0.91.

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