Fabrication of silver interdigitated electrodes on polyimide films via surface modification and ion-exchange technique and its flexible humidity sensor application

Polyimide/Al2O3 films were prepared by the surface modification with different hydrolysis time, ion exchange technique and heat treatment using polyimide films as the substrates and aluminum chloride as the precursor of Al2O3. The morphology, thermal properties and electrical properties of the composite films were characterized and tested. The results indicated the alumina distributed in certain thickness on the surface of the films and there was a clear interface layer between the alumina layer and the substrate. The breakdown strength of the composite films maintains the excellent properties of the pristine film while the thermal and corona-resistant time properties of composite films were better than the pristine film due to introducing aluminum oxide. The composite film which used KOH to treat for 90 min has the longest corona-resistant time (101.2 min), which was almost 10 times longer than the pristine film.

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Design, Modeling and Simulation of MEMS Resonator for Humidity Sensor Application

2020 IEEE Sensors Applications Symposium (SAS) ◽

10.1109/sas48726.2020.9220082 ◽

2020 ◽

Author(s):

Ashaashvini Mutharpavalar ◽

A. Y. Ahmed ◽

Nursyarizal Mohd Nor

Keyword(s):

Modeling And Simulation ◽

Humidity Sensor ◽

Sensor Application ◽

Mems Resonator

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An ion-exchange technique for concentrating ammonia from small volumes of seawater

Marine Chemistry ◽

10.1016/0304-4203(81)90030-x ◽

1981 ◽

Vol 10 (2) ◽

pp. 159-164 ◽

Cited By ~ 2

Author(s):

Ronald T. Riley ◽

Michael C. Mix

Keyword(s):

Ion Exchange ◽

Exchange Technique

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Fabrication and characteristics of the high-sensitivity humidity sensor of anodic aluminum oxide based on silicon substrates

International Journal of Modern Physics B ◽

10.1142/s0217979218501990 ◽

2018 ◽

Vol 32 (16) ◽

pp. 1850199 ◽

Cited By ~ 1

Author(s):

Degao Lan ◽

Xiaofeng Zhao ◽

Fei Wang ◽

Chunpeng Ai ◽

Dianzhong Wen ◽

...

Keyword(s):

Aluminum Oxide ◽

Silicon Substrate ◽

Anodic Aluminum Oxide ◽

Nonlinear Response ◽

Humidity Sensor ◽

High Sensitivity ◽

Silicon Substrates ◽

High Porosity ◽

Interdigitated Electrodes ◽

Anodic Aluminum

The humidity sensor based on silicon substrate is presented in this paper, which consists of anodic aluminum oxide (AAO) film and interdigitated electrodes. By using electro-chemical oxidizing technique, AAO film with high porosity is fabricated on the silicon substrate. Under optimal oxidization condition, pore diameter of 37–79 nm and depth about [Formula: see text]m is achieved. Interdigitated electrodes are fabricated on the top of AAO film by vacuum evaporation deposition method. The results show that the sensor has different nonlinear response in whole range of relative humidity (RH). Moreover, it has almost linear relationship between the capacitance and RH at high RH from 75% to 95%. The highest sensitivity is obtained 613 pF/%RH at 1 kHz, which is much higher than other frequencies.

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