Microfluidic device based on deep reactive ion etching process and its lag effect for single cell capture and extraction

Sensors and Actuators B Chemical ◽

10.1016/j.snb.2018.04.179 ◽

2018 ◽

Vol 269 ◽

pp. 288-292 ◽

Author(s):

Jianguo Feng ◽

Zdenka Fohlerová ◽

Xiaocheng Liu ◽

Honglong Chang ◽

Pavel Neužil

Keyword(s):

Single Cell ◽

Microfluidic Device ◽

Reactive Ion Etching ◽

Etching Process ◽

Cell Capture ◽

Ion Etching ◽

Deep Reactive Ion Etching ◽

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Modeling and simulation of the lag effect in a deep reactive ion etching process

Journal of Micromechanics and Microengineering ◽

10.1088/0960-1317/16/12/008 ◽

2006 ◽

Vol 16 (12) ◽

pp. 2570-2575 ◽

Author(s):

Yiyong Tan ◽

Rongchun Zhou ◽

Haixia Zhang ◽

Guizhang Lu ◽

Zhihong Li

Keyword(s):

Modeling And Simulation ◽

Reactive Ion Etching ◽

Etching Process ◽

Ion Etching ◽

Deep Reactive Ion Etching ◽

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A new deep reactive ion etching process by dual sidewall protection layer

Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) ◽

10.1109/memsys.2000.838529 ◽

2002 ◽

Author(s):

J. Ohara ◽

K. Kano ◽

Y. Takeuchi ◽

N. Ohya ◽

Y. Otsuka ◽

...

Keyword(s):

Reactive Ion Etching ◽

Etching Process ◽

Ion Etching ◽

Deep Reactive Ion Etching ◽

Protection Layer

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Optimization of Cryogenic Deep Reactive Ion Etching Process for On-Chip Energy Storage

2019 42nd International Spring Seminar on Electronics Technology (ISSE) ◽

10.1109/isse.2019.8810293 ◽

2019 ◽

Author(s):

Jan Prasek ◽

David Houska ◽

Radim Hrdy ◽

Jaromir Hubalek ◽

Ulrich Schmid

Keyword(s):

Energy Storage ◽

Reactive Ion Etching ◽

Etching Process ◽

Ion Etching ◽

Deep Reactive Ion Etching ◽

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Development of Direct Deep Reactive Ion Etching Process Using Laser Interference Lithographed Etch Barrier without Intermediate Layer

Japanese Journal of Applied Physics ◽

10.7567/jjap.52.10mc04 ◽

2013 ◽

Vol 52 (10S) ◽

pp. 10MC04 ◽

Author(s):

Soonkyu Je ◽

Jongmyeong Shim ◽

Joongeok Kim ◽

Minsoo Kim ◽

Jinhyung Lee ◽

...

Keyword(s):

Intermediate Layer ◽

Reactive Ion Etching ◽

Etching Process ◽

Laser Interference ◽

Ion Etching ◽

Deep Reactive Ion Etching

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Statistical key variable analysis and model-based control for improvement performance in a deep reactive ion etching process

Journal of Semiconductors ◽

10.1088/1674-4926/33/6/066002 ◽

2012 ◽

Vol 33 (6) ◽

pp. 066002

Author(s):

Shan Chen ◽

Tianhong Pan ◽

Zhengming Li ◽

Shi-Shang Jang

Keyword(s):

Reactive Ion Etching ◽

Etching Process ◽

Ion Etching ◽

Deep Reactive Ion Etching ◽

Model Based Control ◽

Model Based ◽

Variable Analysis

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A three-step model of black silicon formation in Deep Reactive Ion Etching process

2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) ◽

10.1109/memsys.2015.7050965 ◽

2015 ◽

Author(s):

Fuyun Zhu ◽

Chen Wang ◽

Xiaosheng Zhang ◽

Xin Zhao ◽

Haixia Zhang

Keyword(s):

Reactive Ion Etching ◽

Etching Process ◽

Black Silicon ◽

Ion Etching ◽

Deep Reactive Ion Etching ◽

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Process for fabricating microactuator membranes of piezoelectric inkjet print head using multi‐step deep reactive ion etching process

Micro & Nano Letters ◽

10.1049/mnl.2016.0805 ◽

2017 ◽

Vol 12 (7) ◽

pp. 482-485

Author(s):

Wenqiang Wang ◽

Chen Li ◽

Wencai Xu ◽

Helin Zou

Keyword(s):

Reactive Ion Etching ◽

Etching Process ◽

Ion Etching ◽

Deep Reactive Ion Etching ◽

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Improvement of Deep Reactive Ion Etching Process For Motional Resistance Reduction of Capacitively Transduced Vibrating Resonators

IEEE Sensors Letters ◽

10.1109/lsens.2018.2797076 ◽

2018 ◽

Vol 2 (1) ◽

pp. 1-4 ◽

Author(s):

Abdulrahman Alsolami ◽

Adnan Zaman ◽

Ivan Fernando Rivera ◽

Masoud Baghelani ◽

Jing Wang

Keyword(s):

Reactive Ion Etching ◽

Etching Process ◽

Ion Etching ◽

Deep Reactive Ion Etching ◽

Resistance Reduction ◽

Motional Resistance

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Formation of Silicon Nanopores and Nanopillars by a Maskless Deep Reactive Ion Etching Process

TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference ◽

10.1109/sensor.2007.4300078 ◽

2007 ◽

Author(s):

Zhiyong Xiao ◽

Chunhua Feng ◽

Philip C.H. Chan ◽

I-Ming Hsing

Keyword(s):

Reactive Ion Etching ◽

Etching Process ◽

Ion Etching ◽

Deep Reactive Ion Etching

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Inclination Effects on Voltage-controlled Tuning of MEMS Disk Resonator Array Composite Fabricated by Deep Reactive Ion Etching Process

Sensors and Materials ◽

10.18494/sam.2018.1972 ◽

2018 ◽

Vol 30 (11) ◽

pp. 2747

Author(s):

Haixia Yan ◽

Jinyan Bao ◽

Quan Yu ◽

Linxi Dong

Keyword(s):

Reactive Ion Etching ◽

Etching Process ◽

Disk Resonator ◽

Ion Etching ◽

Deep Reactive Ion Etching

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