Influence of the Surface Roughness of a Silicon Disk Resonator on Its Q-Factor

This article presents a silicon disk resonator of the whispering-gallery-mode (WGM) type. The calculated Q-factor of the silicon WGM resonator was 107. Two methods of studying the surface roughness of a silicon WGM resonator with a nonlinear profile by means of Helios 650 scanning electron microscope and Bruker atomic force microscope (AFM) are presented. The results obtained by the two methods agreed well with each other. A comparison of the surface roughness values of WGM resonators manufactured using different technological approaches is presented. Based on the obtained data, a preliminary estimated Q-factor calculation of the resonators was performed, which was refined by numerical calculation using the finite-difference time-domain (FDTD) method. The effect of the surface roughness of the resonator on its Q-factor was found. Reducing the surface roughness of the resonator from 30 nm to 1–2 nm led to an increase in its Q-factor from 104 to 107.

Design of Wideband Bandpass Filter Based on Corrugated Disk Resonator with Multiple Resonant Modes

A corrugated disk resonator with eight grooves is proposed for wideband bandpass filter (BPF) design. Due to the spoof localized surface plasmons resonances of the corrugated metallic structure, the dipole, quadrupole, hexapole modes, and a fundamental mode excited by the introduced short-circuited via holes are employed to realize four transmission poles (TPs) in the passband. The theoretical analysis is described by the electric field and current distributions on the resonator. The resonant frequencies can be tuned easily by the parameters of the structure, which can be used to adjust the center frequency and bandwidth of the BPF freely. Furthermore, two resonators are cascaded to obtain eight TPs to improve the selectivity performance. Finally, three fabricated filters demonstrate the design method.