Statistical key variable analysis and model-based control for improvement performance in a deep reactive ion etching process

2012 ◽  
Vol 33 (6) ◽  
pp. 066002
Author(s):  
Shan Chen ◽  
Tianhong Pan ◽  
Zhengming Li ◽  
Shi-Shang Jang
Keyword(s):  
Reactive Ion Etching ◽  
Etching Process ◽  
Ion Etching ◽  
Deep Reactive Ion Etching ◽  
Model Based Control ◽  
Model Based ◽  
Variable Analysis

Modeling and simulation of the lag effect in a deep reactive ion etching process

2006 ◽  
Vol 16 (12) ◽  
pp. 2570-2575 ◽  
Author(s):  
Yiyong Tan ◽  
Rongchun Zhou ◽  
Haixia Zhang ◽  
Guizhang Lu ◽  
Zhihong Li
Keyword(s):  
Modeling And Simulation ◽  
Reactive Ion Etching ◽  
Etching Process ◽  
Ion Etching ◽  
Deep Reactive Ion Etching ◽  
Lag Effect

scholarly journals Improvement of Deep Reactive Ion Etching Process For Motional Resistance Reduction of Capacitively Transduced Vibrating Resonators

2018 ◽  
Vol 2 (1) ◽  
pp. 1-4 ◽  
Author(s):  
Abdulrahman Alsolami ◽  
Adnan Zaman ◽  
Ivan Fernando Rivera ◽  
Masoud Baghelani ◽  
Jing Wang
Keyword(s):  
Reactive Ion Etching ◽  
Etching Process ◽  
Ion Etching ◽  
Deep Reactive Ion Etching ◽  
Resistance Reduction ◽  
Motional Resistance
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