Study on the mode transitions for rf power dissipation in capacitively coupled plasma
2005 ◽
Vol 193
(1-3)
◽
pp. 81-87
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Keyword(s):
Rf Power
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Keyword(s):
Keyword(s):
Keyword(s):
2012 ◽
Vol 33
(10)
◽
pp. 104004
◽
2004 ◽
Vol 32
(1)
◽
pp. 90-100
◽
Keyword(s):
1997 ◽
Vol 52
(13)
◽
pp. 1983-1993
◽