Improvement in ion beam quality for thin-film formation

2004 ◽  
Vol 188-189 ◽  
pp. 265-267 ◽  
Author(s):  
T. Sadahiro ◽  
K. Matsuyama ◽  
M. Kiuchi ◽  
T. Matumoto ◽  
T. Takizawa ◽  
...  
Keyword(s):  
Thin Film ◽  
Film Formation ◽  
Beam Quality ◽  
Ion Beam ◽  
Thin Film Formation

Advanced ion beam technology for versatile oxide thin film formation

2007 ◽  
Vol 7 (5) ◽  
pp. 561-573 ◽  
Author(s):  
Young-gun Han ◽  
Jung Hwan Lee ◽  
Un-Jung Yeo ◽  
Seok-Kyun Song ◽  
Jin-Wook Sung ◽  
...  
Keyword(s):  
Thin Film ◽  
Film Formation ◽  
Ion Beam ◽  
Oxide Thin Film ◽  
Thin Film Formation

Optical thin film formation by gas-cluster ion beam assisted deposition

1999 ◽  
Author(s):  
H. Katsumata ◽  
J. Matsuo ◽  
T. Nishihara ◽  
T. Tachibana ◽  
K. Yamada ◽  
...  
Keyword(s):  
Thin Film ◽  
Film Formation ◽  
Ion Beam ◽  
Optical Thin Film ◽  
Ion Beam Assisted Deposition ◽  
Cluster Ion ◽  
Thin Film Formation ◽  
Gas Cluster Ion Beam

Diamond-like carbon thin film formation by ion-beam-assisted deposition

1994 ◽  
Vol 66 (1-3) ◽  
pp. 514-518 ◽  
Author(s):  
Yoshinori Funada ◽  
Kaoru Awazu ◽  
Kisaburo Shimamura ◽  
Hiroshi Watanabe ◽  
Masaya Iwaki
Keyword(s):  
Thin Film ◽  
Film Formation ◽  
Ion Beam ◽  
Diamond Like Carbon ◽  
Ion Beam Assisted Deposition ◽  
Carbon Thin Film ◽  
Thin Film Formation

scholarly journals Processes of Thin Film Formation Using Ion Beam Assist.

2002 ◽  
Vol 71 (4) ◽  
pp. 214-218 ◽  
Author(s):  
Ichiro TAKANO ◽  
Isao NAKAMURA ◽  
Yoshio SAWADA
Keyword(s):  
Thin Film ◽  
Film Formation ◽  
Ion Beam ◽  
Thin Film Formation

RFe2 (R=rare earth) thin film formation by an ion beam sputtering system with a plasma filament type ion source

1993 ◽  
Vol 59 (1-3) ◽  
pp. 156-159 ◽  
Author(s):  
Y. Matsumura ◽  
T. Noguchi ◽  
T. Kurino ◽  
H. Kaneko ◽  
H.H. Uchida ◽  
...  
Keyword(s):  
Thin Film ◽  
Rare Earth ◽  
Film Formation ◽  
Ion Beam ◽  
Ion Source ◽  
Ion Beam Sputtering ◽  
Beam Sputtering ◽  
Thin Film Formation ◽  
Filament Type ◽  
Sputtering System

Thin‐film formation using single‐grid ion‐beam sputtering

1987 ◽  
Vol 5 (3) ◽  
pp. 343-346 ◽  
Author(s):  
Chikara Nishimura ◽  
Keiichi Yanagisawa ◽  
Akio Tago ◽  
Tomoyuki Toshima
Keyword(s):  
Thin Film ◽  
Film Formation ◽  
Ion Beam ◽  
Ion Beam Sputtering ◽  
Beam Sputtering ◽  
Thin Film Formation
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