Thin‐film formation using single‐grid ion‐beam sputtering

1987 ◽  
Vol 5 (3) ◽  
pp. 343-346 ◽  
Author(s):  
Chikara Nishimura ◽  
Keiichi Yanagisawa ◽  
Akio Tago ◽  
Tomoyuki Toshima
Keyword(s):  
Thin Film ◽  
Film Formation ◽  
Ion Beam ◽  
Ion Beam Sputtering ◽  
Beam Sputtering ◽  
Thin Film Formation

RFe2 (R=rare earth) thin film formation by an ion beam sputtering system with a plasma filament type ion source

1993 ◽  
Vol 59 (1-3) ◽  
pp. 156-159 ◽  
Author(s):  
Y. Matsumura ◽  
T. Noguchi ◽  
T. Kurino ◽  
H. Kaneko ◽  
H.H. Uchida ◽  
...  
Keyword(s):  
Thin Film ◽  
Rare Earth ◽  
Film Formation ◽  
Ion Beam ◽  
Ion Source ◽  
Ion Beam Sputtering ◽  
Beam Sputtering ◽  
Thin Film Formation ◽  
Filament Type ◽  
Sputtering System

Influence of ion beam parameters onto two-dimensional optical thin film thickness distributions deposited by ion beam sputtering

2019 ◽  
Vol 682 ◽  
pp. 109-120 ◽  
Author(s):  
Wjatscheslaw Sakiew ◽  
Stefan Schrameyer ◽  
Marco Jupé ◽  
Philippe Schwerdtner ◽  
Nick Erhart ◽  
...  
Keyword(s):  
Thin Film ◽  
Film Thickness ◽  
Ion Beam ◽  
Two Dimensional ◽  
Ion Beam Sputtering ◽  
Thin Film Thickness ◽  
Optical Thin Film ◽  
Beam Sputtering ◽  
Beam Parameters

Characteristics of optical band gap of tantalum oxide thin film deposited by ion beam sputtering

2017 ◽  
Vol 25 (1) ◽  
pp. 21-27
Author(s):  
刘华松 LIU Hua-song ◽  
杨 霄 YANG Xiao ◽  
王利栓 WANG Li-shuan ◽  
姜玉刚 JIANG Yu-gang ◽  
季一勤 JI Yi-qin ◽  
...  
Keyword(s):  
Thin Film ◽  
Band Gap ◽  
Optical Band Gap ◽  
Ion Beam ◽  
Tantalum Oxide ◽  
Oxide Thin Film ◽  
Ion Beam Sputtering ◽  
Beam Sputtering

Ln-Ba-Cu-O Thin Film Deposited by Ion Beam Sputtering

1989 ◽  
pp. 527-531
Author(s):  
Tsutomu Yotsuya ◽  
Yoshihiko Suzuki ◽  
Soichi Ogawa ◽  
Hajime Kuwahara ◽  
Tetsuro Tajima ◽  
...  
Keyword(s):  
Thin Film ◽  
Ion Beam ◽  
Ion Beam Sputtering ◽  
Beam Sputtering

Fe‐C film formation by dual ion beam sputtering

1987 ◽  
Vol 61 (12) ◽  
pp. 5480-5483 ◽  
Author(s):  
Toshio Kobayashi ◽  
Shigekazu Ootomo ◽  
Noriyuki Kumasaka
Keyword(s):  
Film Formation ◽  
Ion Beam ◽  
Ion Beam Sputtering ◽  
Beam Sputtering ◽  
Dual Ion Beam Sputtering

The effect of charged particles when preparing ZnO thin film by ion beam sputtering deposition

1988 ◽  
Vol 33-34 ◽  
pp. 1114-1119 ◽  
Author(s):  
Yoshihiko Suzuki ◽  
Tsutom Yotsuya ◽  
Katsumi Takiguchi ◽  
Masaaki Yoshitake ◽  
Soichi Ogawa
Keyword(s):  
Thin Film ◽  
Ion Beam ◽  
Charged Particles ◽  
Zno Thin Film ◽  
Ion Beam Sputtering ◽  
Sputtering Deposition ◽  
Beam Sputtering

Controlled thin-film deposition of α or β Ga2O3 by ion-beam sputtering

2020 ◽  
Vol 38 (6) ◽  
pp. 063412
Author(s):  
Martin Becker ◽  
Sebastian L. Benz ◽  
Limei Chen ◽  
Angelika Polity ◽  
Peter J. Klar ◽  
...  
Keyword(s):  
Thin Film ◽  
Ion Beam ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Ion Beam Sputtering ◽  
Beam Sputtering
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