Low temperature deposition of TiB2 by inductively coupled plasma assisted CVD

2007 ◽  
Vol 201 (9-11) ◽  
pp. 5211-5215 ◽  
Author(s):  
S.H. Lee ◽  
K.H. Nam ◽  
S.C. Hong ◽  
J.J. Lee
Keyword(s):  
Low Temperature ◽  
Inductively Coupled Plasma ◽  
Inductively Coupled ◽  
Low Temperature Deposition ◽  
Temperature Deposition

Low temperature deposition with inductively coupled plasma

2006 ◽  
Vol 97 (4) ◽  
pp. 475-479
Author(s):  
Seung-Hoon Lee ◽  
Dong-Ha Jung ◽  
Seung-Jae Jung ◽  
Seung-Chan Hong ◽  
Jung-Joong Lee
Keyword(s):  
Low Temperature ◽  
Inductively Coupled Plasma ◽  
Inductively Coupled ◽  
Low Temperature Deposition ◽  
Temperature Deposition

Low-temperature deposition of SiNx Films in SiH4/Ar + N2 inductively coupled plasma under high silane dilution with argon

2017 ◽  
Vol 51 (11) ◽  
pp. 1449-1452
Author(s):  
A. I. Okhapkin ◽  
S. A. Korolyov ◽  
P. A. Yunin ◽  
M. N. Drozdov ◽  
S. A. Kraev ◽  
...  
Keyword(s):  
Low Temperature ◽  
Inductively Coupled Plasma ◽  
Inductively Coupled ◽  
Low Temperature Deposition ◽  
Temperature Deposition

scholarly journals Inductively coupled Ar/CH4/H2 plasmas for low-temperature deposition of ordered carbon nanostructures

2004 ◽  
Vol 95 (5) ◽  
pp. 2713-2724 ◽  
Author(s):  
I. B. Denysenko ◽  
S. Xu ◽  
J. D. Long ◽  
P. P. Rutkevych ◽  
N. A. Azarenkov ◽  
...  
Keyword(s):  
Low Temperature ◽  
Carbon Nanostructures ◽  
Inductively Coupled ◽  
Low Temperature Deposition ◽  
Temperature Deposition

Fabrication of Chitosan-nanohydroxyapatite Scaffolds via Low-temperature Deposition Manufacturing

2011 ◽  
Vol 26 (1) ◽  
pp. 12-16 ◽  
Author(s):  
Xiong-Fei ZHENG ◽  
Wen-Jie ZHAI ◽  
Ying-Chun LIANG ◽  
Tao SUN
Keyword(s):  
Low Temperature ◽  
Low Temperature Deposition ◽  
Temperature Deposition
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