Hydrogen-free carbon thin films prepared by new type surface-wave-sustained plasma (SWP)

2007 ◽  
Vol 201 (15) ◽  
pp. 6631-6634 ◽  
Author(s):  
Junqi Xu ◽  
Huiqing Fan ◽  
Hiroyuki Kousaka ◽  
Noritsugu Umehara ◽  
Weiguo Liu
Keyword(s):  
Thin Films ◽  
Surface Wave ◽  
Free Carbon ◽  
New Type ◽  
Carbon Thin Films

Hydrogen-free carbon thin films prepared by unbalanced magnetron sputtering

2006 ◽  
Author(s):  
Junqi Xu ◽  
Lingxia Hang ◽  
Weiguo Liu ◽  
Huiqing Fan ◽  
Yingxue Xing
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Free Carbon ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron ◽  
Carbon Thin Films

Fluorine incorporated amorphous carbon thin films prepared by Surface Wave Microwave Plasma CVD

2008 ◽  
Vol 17 (7-10) ◽  
pp. 1697-1701 ◽  
Author(s):  
Golap Kalita ◽  
Hare Ram Aryal ◽  
Sudip Adhikari ◽  
Dilip C. Ghimire ◽  
Rakesh A. Afre ◽  
...  
Keyword(s):  
Thin Films ◽  
Surface Wave ◽  
Amorphous Carbon ◽  
Microwave Plasma ◽  
Plasma Cvd ◽  
Microwave Plasma Cvd ◽  
Carbon Thin Films

Electrical conductivity improvement by iodine doping for diamond-like carbon thin-films deposited by microwave surface wave plasma CVD

2006 ◽  
Vol 15 (4-8) ◽  
pp. 645-648 ◽  
Author(s):  
Ashraf M.M. Omer ◽  
Sudip Adhikari ◽  
Sunil Adhikary ◽  
Mohamad Rusop ◽  
Hideo Uchida ◽  
...  
Keyword(s):  
Thin Films ◽  
Electrical Conductivity ◽  
Surface Wave ◽  
Diamond Like Carbon ◽  
Plasma Cvd ◽  
Iodine Doping ◽  
Carbon Thin Films

Optical and structural properties of amorphous carbon thin films deposited by microwave surface-wave plasma CVD

2006 ◽  
Vol 15 (2-3) ◽  
pp. 188-192 ◽  
Author(s):  
Sudip Adhikari ◽  
Sunil Adhikary ◽  
Ashraf M.M. Omer ◽  
Mohamad Rusop ◽  
Hideo Uchida ◽  
...  
Keyword(s):  
Thin Films ◽  
Surface Wave ◽  
Structural Properties ◽  
Amorphous Carbon ◽  
Plasma Cvd ◽  
Carbon Thin Films

Enhancement of fluorine doped amorphous carbon thin films from microwave surface wave plasma activated above room temperature

2009 ◽  
Vol 18 (2-3) ◽  
pp. 465-468 ◽  
Author(s):  
Dilip Chandra Ghimire ◽  
Sudip Adhikari ◽  
Hare Ram Aryal ◽  
Golap Kalita ◽  
Masayoshi Umeno
Keyword(s):  
Thin Films ◽  
Surface Wave ◽  
Amorphous Carbon ◽  
Room Temperature ◽  
Carbon Thin Films

Characteristics of nitrogen doped diamond-like carbon thin films grown by microwave surface-wave plasma CVD

2006 ◽  
Vol 15 (11-12) ◽  
pp. 1906-1908 ◽  
Author(s):  
Hare Ram Aryal ◽  
Sudip Adhikari ◽  
Sunil Adhikary ◽  
Hideo Uchida ◽  
Masayoshi Umeno
Keyword(s):  
Thin Films ◽  
Surface Wave ◽  
Diamond Like Carbon ◽  
Plasma Cvd ◽  
Nitrogen Doped ◽  
Carbon Thin Films

Effect of substrate bias voltage on the properties of diamond-like carbon thin films deposited by microwave surface wave plasma CVD

2008 ◽  
Vol 17 (4-5) ◽  
pp. 696-699 ◽  
Author(s):  
Sudip Adhikari ◽  
Dilip Chandra Ghimire ◽  
Hare Ram Aryal ◽  
Golap Kalita ◽  
Masayoshi Umeno
Keyword(s):  
Thin Films ◽  
Surface Wave ◽  
Bias Voltage ◽  
Diamond Like Carbon ◽  
Substrate Bias ◽  
Plasma Cvd ◽  
Substrate Bias Voltage ◽  
Carbon Thin Films

Effects of iodine doping on optoelectronic properties of diamond-like carbon thin films deposited by microwave surface wave plasma CVD

2004 ◽  
Vol 13 (11-12) ◽  
pp. 2136-2139 ◽  
Author(s):  
Ashraf M.M. Omer ◽  
Sudip Adhikari ◽  
Sunil Adhikary ◽  
Hideo Uchida ◽  
Masayoshi Umeno
Keyword(s):  
Thin Films ◽  
Surface Wave ◽  
Optoelectronic Properties ◽  
Diamond Like Carbon ◽  
Plasma Cvd ◽  
Iodine Doping ◽  
Carbon Thin Films
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