High-density silicon nitride deposited at low substrate temperature with high deposition rate using hot wire chemical vapour deposition

2007 ◽  
Vol 201 (22-23) ◽  
pp. 9285-9288 ◽  
Author(s):  
V. Verlaan ◽  
R. Bakker ◽  
C.H.M. van der Werf ◽  
Z.S. Houweling ◽  
Y. Mai ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Substrate Temperature ◽  
Deposition Rate ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
High Density ◽  
High Deposition Rate ◽  
Hot Wire

scholarly journals Hot-Wire Chemical Vapour Deposition for Silicon Nitride Waveguides

2016 ◽  
Vol 72 (4) ◽  
pp. 269-272 ◽  
Author(s):  
T. Dominguez Bucio ◽  
A. Tarazona ◽  
A. Z. Khokhar ◽  
G. Z. Mashanovich ◽  
F. Y. Gardes
Keyword(s):  
Silicon Nitride ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Hot Wire

Growth of high density NiSi/SiC core-shell nanowires by hot-wire chemical vapour deposition for electrochemical applications

2017 ◽  
Vol 132 ◽  
pp. 187-198 ◽  
Author(s):  
Najwa binti Hamzan ◽  
Muhammad Mukhlis bin Ramly ◽  
Nay Ming Huang ◽  
Saadah Abdul Rahman ◽  
Boon Tong Goh
Keyword(s):  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
High Density ◽  
Core Shell ◽  
Hot Wire ◽  
Electrochemical Applications ◽  
Shell Nanowires

Large-scale synthesis of single-crystal molybdenum trioxide nanobelts by hot-wire chemical vapour deposition

2015 ◽  
Vol 619 ◽  
pp. 406-410 ◽  
Author(s):  
Jianjun Chen ◽  
Mingming Wang ◽  
Xin Liao ◽  
Zhaoxiang Liu ◽  
Judong Zhang ◽  
...  
Keyword(s):  
Single Crystal ◽  
Chemical Vapour Deposition ◽  
Large Scale ◽  
Vapour Deposition ◽  
Molybdenum Trioxide ◽  
Chemical Vapour ◽  
Hot Wire ◽  
Large Scale Synthesis
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