Comparative study of high-power pulsed sputtering (HPPS) glow plasma techniques using Penning discharge and hollow-cathode discharge

2011 ◽  
Vol 206 (5) ◽  
pp. 938-942 ◽  
Author(s):  
Kingo Azuma ◽  
Ryosuke Mieda ◽  
Ken Yukimura ◽  
Hiroshi Tamagaki ◽  
Tadao Okimoto
Keyword(s):  
Comparative Study ◽  
High Power ◽  
Hollow Cathode ◽  
Hollow Cathode Discharge ◽  
Glow Plasma ◽  
Plasma Techniques

Comparison of plasma characteristics of high-power pulsed sputtering glow discharge and hollow-cathode discharge

2020 ◽  
Vol 60 (1) ◽  
pp. 015501
Author(s):  
Shoki Abe ◽  
Katsuyuki Takahashi ◽  
Seiji Mukaigawa ◽  
Koichi Takaki ◽  
Ken Yukimura
Keyword(s):  
Glow Discharge ◽  
High Power ◽  
Hollow Cathode ◽  
Hollow Cathode Discharge ◽  
Plasma Characteristics

Study of high-power pulsed RF generators based on a hollow-cathode discharge

2009 ◽  
Vol 35 (11) ◽  
pp. 941-961 ◽  
Author(s):  
S. V. Bulychev ◽  
D. V. Vyalykh ◽  
A. E. Dubinov ◽  
V. S. Zhdanov ◽  
I. Yu. Kornilova ◽  
...  
Keyword(s):  
High Power ◽  
Hollow Cathode ◽  
Hollow Cathode Discharge ◽  
Pulsed Rf

High-Power Compact $P$ -Band UHF Oscillator Based on Hollow Cathode Discharge

2015 ◽  
Vol 43 (6) ◽  
pp. 1906-1910 ◽  
Author(s):  
Sergey V. Bulychev ◽  
Alexander E. Dubinov ◽  
Igor L. L'vov ◽  
Sergey A. Sadovoy ◽  
Victor D. Selemir ◽  
...  
Keyword(s):  
High Power ◽  
Hollow Cathode ◽  
Hollow Cathode Discharge

Measurements of Rotational Temperatures in the Hollow Cathode Discharge

1981 ◽  
Vol 35 (1) ◽  
pp. 57-59 ◽  
Author(s):  
J. S. Dobrosavljević ◽  
D. S. Pešić
Keyword(s):  
Comparative Study ◽  
Hollow Cathode ◽  
Discharge Current ◽  
Pressure Range ◽  
Gas Pressure ◽  
Hollow Cathode Discharge

Rotational temperatures in the uncooled hollow cathode discharge (HCD) have been measured. Using rotational lines of the OH (0,0) band, the temperatures were measured in a helium fill gas pressure range from 266 to 2130 Pa and in the discharge current between 0.1 and 0.3 A. A comparative study of these temperatures with gas and excitation temperatures in HCD is presented.

A high-power, high-frequency pulse generator based on a hollow-cathode discharge

2005 ◽  
Vol 48 (1) ◽  
pp. 71-74 ◽  
Author(s):  
D. V. Vyalykh ◽  
A. E. Dubinov ◽  
I. L. L?vov ◽  
S. A. Sadovoi ◽  
V. D. Selemir
Keyword(s):  
High Power ◽  
Hollow Cathode ◽  
High Frequency ◽  
Pulse Generator ◽  
Hollow Cathode Discharge ◽  
Frequency Pulse

Comparative study of the sputtering process in the conventional and microwave-coupled hollow-cathode discharge

1986 ◽  
Vol 1 (3) ◽  
pp. 231 ◽  
Author(s):  
Sergio Caroli ◽  
Oreste Senofonte ◽  
Nicola Violante ◽  
Oriano Falasca ◽  
Achille Marconi ◽  
...  
Keyword(s):  
Comparative Study ◽  
Hollow Cathode ◽  
Hollow Cathode Discharge

Characteristics of a high-power RF oscillator based on a pulsed hollow-cathode discharge

2001 ◽  
Vol 29 (6) ◽  
pp. 895-902 ◽  
Author(s):  
Yu.P. Bliokh ◽  
J. Felsteiner ◽  
Y.Z. Slutsker ◽  
P.M. Vaisberg
Keyword(s):  
High Power ◽  
Hollow Cathode ◽  
Hollow Cathode Discharge
Sign in / Sign up

Export Citation Format

Share Document