scholarly journals Overcoming sheaths overlapping in a small diameter metallic tube with one end closed and using a high density plasma from a high power pulsed hollow cathode discharge

AIP Advances ◽  
2018 ◽  
Vol 8 (8) ◽  
pp. 085103 ◽  
Author(s):  
M. Ueda ◽  
C. Silva ◽  
G. B. de Souza ◽  
S. F. M. Mariano ◽  
L. Pichon
Keyword(s):  
High Power ◽  
Hollow Cathode ◽  
Small Diameter ◽  
High Density ◽  
Hollow Cathode Discharge ◽  
Metallic Tube ◽  
Density Plasma

RF Plasma CVD Using Hollow Cathode Discharge

1988 ◽  
Vol 129 ◽  
Author(s):  
Shin Araki ◽  
Hideki Kamaji ◽  
Kazuo Norimoto
Keyword(s):  
Hollow Cathode ◽  
Low Pressure ◽  
High Density ◽  
Hollow Cathode Discharge ◽  
Rf Plasma ◽  
High Deposition Rate ◽  
Plasma Cvd ◽  
Plasma Damage ◽  
Discharge Electrode ◽  
Density Plasma

ABSTRACTWe have made a-Si photoreceptors at low pressure to prevent the formation of SimHn powders and by separating the growing surface from the high density plasma. A new plasma CVD method using a hollow-cathode discharge, where the discharge electrode is the cathode, is described. There is a hollow region in the discharge electrode. Hollow-cathode discharge enables a high density plasma to form at low pressure. The gas is decomposed in the hollow cathode preventing plasma damage to the film. This method allows us to achieve a high deposition rate (10 µm/h) and good quality films for photoreceptors.

Comparison of plasma characteristics of high-power pulsed sputtering glow discharge and hollow-cathode discharge

2020 ◽  
Vol 60 (1) ◽  
pp. 015501
Author(s):  
Shoki Abe ◽  
Katsuyuki Takahashi ◽  
Seiji Mukaigawa ◽  
Koichi Takaki ◽  
Ken Yukimura
Keyword(s):  
Glow Discharge ◽  
High Power ◽  
Hollow Cathode ◽  
Hollow Cathode Discharge ◽  
Plasma Characteristics

Study of high-power pulsed RF generators based on a hollow-cathode discharge

2009 ◽  
Vol 35 (11) ◽  
pp. 941-961 ◽  
Author(s):  
S. V. Bulychev ◽  
D. V. Vyalykh ◽  
A. E. Dubinov ◽  
V. S. Zhdanov ◽  
I. Yu. Kornilova ◽  
...  
Keyword(s):  
High Power ◽  
Hollow Cathode ◽  
Hollow Cathode Discharge ◽  
Pulsed Rf

High-Power Compact $P$ -Band UHF Oscillator Based on Hollow Cathode Discharge

2015 ◽  
Vol 43 (6) ◽  
pp. 1906-1910 ◽  
Author(s):  
Sergey V. Bulychev ◽  
Alexander E. Dubinov ◽  
Igor L. L'vov ◽  
Sergey A. Sadovoy ◽  
Victor D. Selemir ◽  
...  
Keyword(s):  
High Power ◽  
Hollow Cathode ◽  
Hollow Cathode Discharge

Novel Hollow Cathode Plasma Source with selfsustaining high density plasma

2013 ◽  
Author(s):  
Desmond Gibson ◽  
Ewan Waddall ◽  
david child ◽  
Frank Placido
Keyword(s):  
Hollow Cathode ◽  
Plasma Source ◽  
High Density ◽  
Cathode Plasma ◽  
Density Plasma

A high-power, high-frequency pulse generator based on a hollow-cathode discharge

2005 ◽  
Vol 48 (1) ◽  
pp. 71-74 ◽  
Author(s):  
D. V. Vyalykh ◽  
A. E. Dubinov ◽  
I. L. L?vov ◽  
S. A. Sadovoi ◽  
V. D. Selemir
Keyword(s):  
High Power ◽  
Hollow Cathode ◽  
High Frequency ◽  
Pulse Generator ◽  
Hollow Cathode Discharge ◽  
Frequency Pulse

Plasma Sintering of Ceramics

1983 ◽  
Vol 24 ◽  
Author(s):  
D. Lynn Johnson ◽  
Wayne B. Sanderson ◽  
Eric L. Kemer ◽  
Jennifer Knowlton
Keyword(s):  
Grain Size ◽  
Hollow Cathode ◽  
High Density ◽  
Hollow Cathode Discharge ◽  
Microwave Induced Plasma ◽  
Fine Grain ◽  
Plasma Sintering

ABSTRACTAlumina rods doped with MgO have been sintered by rapid translation through three plasma devices, namely a microwave induced plasma, a hollow cathode discharge, and an RF induction coupled plasma. Rapid densification to high density and fine grain size was observed. Some similarities and significant differences existed among the different devices.

Production of High-Density Radio-Frequency Plasma Source by Ring-Shaped Hollow-Cathode Discharge at Various Trench Shapes

2013 ◽  
Vol 41 (8) ◽  
pp. 1856-1862 ◽  
Author(s):  
Yasunori Ohtsu ◽  
Yoshiki Yahata ◽  
Johji Kagami ◽  
Yasushi Kawashimo ◽  
Tatsuya Takeuchi
Keyword(s):  
Radio Frequency ◽  
Hollow Cathode ◽  
Plasma Source ◽  
High Density ◽  
Hollow Cathode Discharge ◽  
Radio Frequency Plasma ◽  
Frequency Plasma

Characteristics of a high-power RF oscillator based on a pulsed hollow-cathode discharge

2001 ◽  
Vol 29 (6) ◽  
pp. 895-902 ◽  
Author(s):  
Yu.P. Bliokh ◽  
J. Felsteiner ◽  
Y.Z. Slutsker ◽  
P.M. Vaisberg
Keyword(s):  
High Power ◽  
Hollow Cathode ◽  
Hollow Cathode Discharge
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