Characterization of the properties of high-energy electron irradiated Al-doped ZnO thin films prepared by rf magnetron sputtering using Ar plasma

2011 ◽  
Vol 205 (21-22) ◽  
pp. 5130-5134 ◽  
Author(s):  
Eui-Jung Yun ◽  
Jin Woo Jung ◽  
Byung Cheol Lee ◽  
Myunghee Jung
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
High Energy ◽  
Energy Electron ◽  
Zno Thin Films ◽  
High Energy Electron ◽  
Doped Zno ◽  
Ar Plasma

Effect of high-energy electron beam irradiation on the properties of AZO thin films prepared by rf magnetron sputtering

2010 ◽  
Vol 518 (22) ◽  
pp. 6236-6240 ◽  
Author(s):  
Eui-Jung Yun ◽  
Jin Woo Jung ◽  
Kyung Nam Ko ◽  
Jongha Hwang ◽  
Byung Cheol Lee ◽  
...  
Keyword(s):  
Thin Films ◽  
Electron Beam ◽  
Magnetron Sputtering ◽  
Electron Beam Irradiation ◽  
Rf Magnetron Sputtering ◽  
High Energy ◽  
Energy Electron ◽  
High Energy Electron ◽  
Beam Irradiation

High-energy Electron Beam Irradiation of Al-doped ZnO Thin Films Deposited at Room Temperature

2011 ◽  
Vol 58 (3(1)) ◽  
pp. 555-559 ◽  
Author(s):  
Eui-Jung Yun ◽  
Jin Won Jung ◽  
Jongha Hwang ◽  
Byung Cheol Lee ◽  
Myunghee Jung
Keyword(s):  
Thin Films ◽  
Electron Beam ◽  
Room Temperature ◽  
Electron Beam Irradiation ◽  
High Energy ◽  
Energy Electron ◽  
Zno Thin Films ◽  
High Energy Electron ◽  
Beam Irradiation ◽  
Doped Zno
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