Deposition of titanium oxide films by reactive High Power Impulse Magnetron Sputtering (HiPIMS): Influence of the peak current value on the transition from metallic to poisoned regimes
2012 ◽
Vol 206
(16)
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pp. 3542-3549
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2013 ◽
Vol 41
(8)
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pp. 1837-1843
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2011 ◽
Vol 206
(5)
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pp. 967-971
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2009 ◽
Vol 42
(11)
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pp. 115204
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2005 ◽
Vol 288-289
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pp. 299-302
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2009 ◽
Vol 48
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pp. 071601
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2011 ◽
Vol 8
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pp. 2742-2745
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2008 ◽
Vol 373-374
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pp. 138-141