Microstructure and Platelet Adhesion Behavior of Titanium Oxide Films Synthesized by Reactive High-Power Pulse Magnetron Sputtering

2013 ◽  
Vol 41 (8) ◽  
pp. 1837-1843 ◽  
Author(s):  
Tai-Lei Yin ◽  
Feng-Juan Jing ◽  
Hong Sun ◽  
Yongxiang Leng ◽  
Ken Yukimura ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Titanium Oxide ◽  
High Power ◽  
Platelet Adhesion ◽  
Oxide Films ◽  
Power Pulse ◽  
Pulse Magnetron ◽  
Adhesion Behavior ◽  
Titanium Oxide Films ◽  
High Power Pulse

Influence of Ar/Kr ratio and pulse parameters in a Cr-N high power pulse magnetron sputtering process on plasma and coating properties

2014 ◽  
Vol 32 (2) ◽  
pp. 021513 ◽  
Author(s):  
Kirsten Bobzin ◽  
Nazlim Bagcivan ◽  
Sebastian Theiß ◽  
Jan Trieschmann ◽  
Ricardo Henrique Brugnara ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
High Power ◽  
Coating Properties ◽  
Pulse Parameters ◽  
Power Pulse ◽  
Pulse Magnetron ◽  
High Power Pulse

Film characterization of titanium oxide films prepared by high-power impulse magnetron sputtering

2011 ◽  
Vol 206 (5) ◽  
pp. 967-971 ◽  
Author(s):  
F.J. Jing ◽  
K. Yukimura ◽  
H. Kato ◽  
Y.F. Lei ◽  
T.X. You ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Titanium Oxide ◽  
High Power ◽  
Oxide Films ◽  
Titanium Oxide Films

Tribological Performances of CrSiN Coatings Deposited by High Power Pulse Magnetron Sputtering

2018 ◽  
Vol 281 ◽  
pp. 540-545 ◽  
Author(s):  
Wei Jie Chang ◽  
Hao Zhang ◽  
Ying Ying Chen ◽  
Jun Li ◽  
Xue Zhang ◽  
...  
Keyword(s):  
Wear Resistance ◽  
Magnetron Sputtering ◽  
High Power ◽  
Physical Vapor Deposition ◽  
Protective Coatings ◽  
Energy Dispersive Spectrometer ◽  
Testing Machine ◽  
Power Pulse ◽  
Pulse Magnetron ◽  
High Power Pulse

The coatings deposited by physical vapor deposition (PVD) technique have found a wide industrial application as protective coatings for their attractive properties such as high hardness, good wear resistance and chemical stability. In order to explore the triboligical performances of CrSiN coatings, CrSiN coatings were prepared o the surface of 316 stainless steel by high power pulse magnetron sputtering (HPPMS) in this paper. Sliding wear tests of CrSiN coatings against Si3N4 ceramic balls and titanium balls have been carried out on a friction abrasion testing machine under reciprocating sliding conditions. nanoindentation and scratch tester, field emission scanning electron microscopy equipped with energy dispersive spectrometer (FESEM/EDS) and a X-ray diffractometer (XRD) was used to study the tribological behaviors of CrSiN coatings systematically. Results showed that CrSiN coatings exhibited good wear resistance, which can be attributed to the smoother and denser surface of CrSiN coatings resulted from much fewer macroparticles and pitting defects. The differences on wear debris removal behaviors and wear mechanism were caused by the different microstructure of CrSiN coatings.

Advantages of nanocomposite coatings deposited by high power pulse magnetron sputtering technology

2009 ◽  
Vol 209 (1) ◽  
pp. 165-170 ◽  
Author(s):  
K. Bobzin ◽  
N. Bagcivan ◽  
P. Immich ◽  
S. Bolz ◽  
J. Alami ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
High Power ◽  
Nanocomposite Coatings ◽  
Power Pulse ◽  
Pulse Magnetron ◽  
High Power Pulse
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