Structure and properties of CrSiN nanocomposite coatings deposited by hybrid modulated pulsed power and pulsed dc magnetron sputtering

2013 ◽  
Vol 216 ◽  
pp. 251-258 ◽  
Author(s):  
Jianliang Lin ◽  
Bo Wang ◽  
Yixiang Ou ◽  
William D. Sproul ◽  
Isaac Dahan ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Pulsed Power ◽  
Nanocomposite Coatings ◽  
Structure And Properties ◽  
Dc Magnetron Sputtering ◽  
Pulsed Dc ◽  
Pulsed Dc Magnetron Sputtering

Thick CrN/AlN superlattice coatings deposited by the hybrid modulated pulsed power and pulsed dc magnetron sputtering

2013 ◽  
Vol 228 ◽  
pp. S601-S606 ◽  
Author(s):  
Jianliang Lin ◽  
Niingyi Zhang ◽  
Zhili Wu ◽  
William D. Sproul ◽  
Michael Kaufman ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Pulsed Power ◽  
Dc Magnetron Sputtering ◽  
Pulsed Dc ◽  
Pulsed Dc Magnetron Sputtering

Characterization of Ti–Zr–V thin films deposited by DC and unipolar pulsed DC magnetron sputtering

Vacuum ◽  
2021 ◽  
Vol 188 ◽  
pp. 110200
Author(s):  
Sihui Wang ◽  
Wei Wei ◽  
Yonghao Gao ◽  
Haibin Pan ◽  
Yong Wang
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Dc Magnetron Sputtering ◽  
Pulsed Dc ◽  
Pulsed Dc Magnetron Sputtering
Sign in / Sign up

Export Citation Format

Share Document