Simulation and experimental research on the substrate temperature distribution in HFCVD diamond film growth on the inner hole surface

2013 ◽  
Vol 219 ◽  
pp. 109-118 ◽  
Author(s):  
Xinchang Wang ◽  
Tao Zhang ◽  
Bin Shen ◽  
Jianguo Zhang ◽  
Fanghong Sun
Keyword(s):  
Temperature Distribution ◽  
Substrate Temperature ◽  
Experimental Research ◽  
Diamond Film ◽  
Film Growth ◽  
Diamond Film Growth

First Principles Prediction of Gas-Phase Composition and Substrate Temperature for Diamond Film Growth

2000 ◽  
Vol 25 (1-2) ◽  
pp. 41-51 ◽  
Author(s):  
Yanxin Li ◽  
Donald W. Brenner ◽  
Xialan Dong ◽  
Chiachung Sun
Keyword(s):  
Phase Composition ◽  
Substrate Temperature ◽  
Gas Phase ◽  
Diamond Film ◽  
First Principles ◽  
Film Growth ◽  
Diamond Film Growth

Effect of titanium metal in the prenucleation of ultrananocrystalline diamond film growth at low substrate temperature

2006 ◽  
Vol 15 (11-12) ◽  
pp. 1779-1783 ◽  
Author(s):  
Debabrata Pradhan ◽  
Li-Ju Chen ◽  
Yen-Chih Lee ◽  
Chi-Young Lee ◽  
Nyan-Hwa Tai ◽  
...  
Keyword(s):  
Substrate Temperature ◽  
Diamond Film ◽  
Film Growth ◽  
Titanium Metal ◽  
Ultrananocrystalline Diamond ◽  
Diamond Film Growth

Modelling the substrate-temperature-dependence of diamond film growth

1996 ◽  
Vol 8 (45) ◽  
pp. 8953-8958 ◽  
Author(s):  
Ming-Rong Shen ◽  
Hao Wang ◽  
Zhao-Yuan Ning ◽  
Chao-Ye ◽  
Zhao-Xing Ren
Keyword(s):  
Substrate Temperature ◽  
Temperature Dependence ◽  
Diamond Film ◽  
Film Growth ◽  
Diamond Film Growth

Homo-epitaxial diamond film growth on ion implanted diamond substrates

1996 ◽  
Vol 5 (3-5) ◽  
pp. 272-275 ◽  
Author(s):  
P.S. Weiser ◽  
S. Prawer ◽  
K.W. Nugent ◽  
A.A. Bettiol ◽  
L.I. Kostidis ◽  
...  
Keyword(s):  
Diamond Film ◽  
Film Growth ◽  
Diamond Film Growth ◽  
Ion Implanted

Oxygen poisoning of diamond film growth

1993 ◽  
Vol 63 (19) ◽  
pp. 2641-2643 ◽  
Author(s):  
William N. Howard ◽  
Karl E. Spear ◽  
Michael Frenklach
Keyword(s):  
Diamond Film ◽  
Film Growth ◽  
Oxygen Poisoning ◽  
Diamond Film Growth

Highly Oriented Diamond Film Growth by Atomic Force Microscopy

1998 ◽  
Vol 15 (11) ◽  
pp. 822-824 ◽  
Author(s):  
Jian-long Li ◽  
Ge Meng ◽  
Ke-hui Wu ◽  
En-ge Wang
Keyword(s):  
Atomic Force Microscopy ◽  
Diamond Film ◽  
Film Growth ◽  
Force Microscopy ◽  
Atomic Force ◽  
Diamond Film Growth

A flow-tube study of diamond film growth: methane versus acetylene

1990 ◽  
Vol 9 (6) ◽  
pp. 621-623 ◽  
Author(s):  
L. Robbin Martin ◽  
Michael W. Hill
Keyword(s):  
Diamond Film ◽  
Film Growth ◽  
Flow Tube ◽  
Diamond Film Growth ◽  
Tube Study

Device-grade homoepitaxial diamond film growth

2002 ◽  
Vol 237-239 ◽  
pp. 1269-1276 ◽  
Author(s):  
H. Okushi ◽  
H. Watanabe ◽  
S. Ri ◽  
S. Yamanaka ◽  
D. Takeuchi
Keyword(s):  
Diamond Film ◽  
Film Growth ◽  
Diamond Film Growth
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