Structural and mechanical characterization of nanostructured titanium oxide thin films deposited by filtered cathodic vacuum arc

2013 ◽  
Vol 227 ◽  
pp. 42-47 ◽  
Author(s):  
Carlo Paternoster ◽  
Igor Zhirkov ◽  
Marie-Paule Delplancke-Ogletree
Keyword(s):  
Thin Films ◽  
Titanium Oxide ◽  
Mechanical Characterization ◽  
Vacuum Arc ◽  
Oxide Thin Films ◽  
Nanostructured Titanium ◽  
Filtered Cathodic Vacuum Arc

Preparation and characterization of copper oxide thin films deposited by filtered cathodic vacuum arc

2003 ◽  
Vol 37 (1) ◽  
pp. 81-85 ◽  
Author(s):  
Z H Gan ◽  
G Q Yu ◽  
B K Tay ◽  
C M Tan ◽  
Z W Zhao ◽  
...  
Keyword(s):  
Thin Films ◽  
Copper Oxide ◽  
Vacuum Arc ◽  
Oxide Thin Films ◽  
Filtered Cathodic Vacuum Arc

GROWTH AND STRUCTURAL STUDY OF NANOCRYSTALLINE TITANIUM OXIDE AND ZIRCONIUM OXIDE THIN FILMS DEPOSITED AT LOW TEMPERATURES

2005 ◽  
Vol 04 (04) ◽  
pp. 795-801
Author(s):  
B. K. TAY ◽  
Z. W. ZHAO ◽  
S. P. LAU ◽  
J. X. GAO
Keyword(s):  
Thin Films ◽  
Titanium Oxide ◽  
Low Temperatures ◽  
Zirconium Oxide ◽  
Amorphous Structure ◽  
Film Structure ◽  
Vacuum Arc ◽  
Oxide Thin Films ◽  
Metal Oxide Thin Films ◽  
Filtered Cathodic Vacuum Arc

Titanium oxide and zirconium oxide thin films were deposited at low temperatures (not exceeding 350°C) by off-plane filtered cathodic vacuum arc (FCVA). The film structures were studied by XRD and Raman spectra. For titanium oxide thin films, amorphous structure remains up to 230°C, and anatase film with the crystallite size of 16 nm is observed at 330°C as confirmed by XRD and Raman analysis. For zirconium oxide, the film structure develops from amorphous at room temperature to polycrystalline state at 150°C and above. Moreover, for the crystallized films, preferred orientation is along [-111] direction. At 150°C the films possess nano-sized crystallites (less than 15 nm). For these two kinds of metal oxide thin films, surface roughness both increases with the growth temperature.

Low Temperature Fabrication of Nanostructured Titanium Oxide Thin Films for Uncooled IR Detectors

2012 ◽  
Vol 7 (3) ◽  
pp. 317-321
Author(s):  
Yongfeng Ju ◽  
Zhiming Wu ◽  
Shibin Li ◽  
Xiang Dong ◽  
Yadong Jiang
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Titanium Oxide ◽  
Oxide Thin Films ◽  
Ir Detectors ◽  
Nanostructured Titanium

X-ray, optical and electrical characterization of doped nanocrystalline titanium oxide thin films

2004 ◽  
Vol 109 (1-3) ◽  
pp. 249-251 ◽  
Author(s):  
J Domaradzki ◽  
E.L Prociow ◽  
D Kaczmarek ◽  
T Berlicki ◽  
A Podhorodecki ◽  
...  
Keyword(s):  
Thin Films ◽  
Titanium Oxide ◽  
Electrical Characterization ◽  
Oxide Thin Films ◽  
X Ray ◽  
Nanocrystalline Titanium

On the properties of nanostructured titanium oxide thin films

2009 ◽  
Vol 46 (1-2) ◽  
pp. 209-216 ◽  
Author(s):  
Diana Mardare ◽  
Nicoleta Cornei ◽  
G.I. Rusu
Keyword(s):  
Thin Films ◽  
Titanium Oxide ◽  
Oxide Thin Films ◽  
Nanostructured Titanium
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