Magnetron sputter deposition onto fluidized particle beds
2013 ◽
Vol 221
◽
pp. 94-103
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Keyword(s):
1991 ◽
Vol 137-138
◽
pp. 783-786
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Keyword(s):
2001 ◽
Vol 394
(1-2)
◽
pp. 255-262
◽
Keyword(s):
1996 ◽
Vol 80
(1-2)
◽
pp. 190-194
◽
Keyword(s):
2013 ◽
Vol 39
(5)
◽
pp. 5175-5184
◽
1993 ◽
Vol 60
(1-3)
◽
pp. 480-483
◽
Keyword(s):
2012 ◽
Vol 206
(23)
◽
pp. 4850-4854
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Keyword(s):
1995 ◽
Vol 74-75
◽
pp. 469-473
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Keyword(s):