Plasma diagnostic studies of low-energy ion bombardment in r.f. magnetron sputter deposition
1995 ◽
Vol 74-75
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pp. 469-473
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1995 ◽
Vol 13
(1)
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pp. 156-158
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Keyword(s):
Keyword(s):
1991 ◽
Vol 137-138
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pp. 783-786
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Keyword(s):
2001 ◽
Vol 394
(1-2)
◽
pp. 255-262
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Keyword(s):
1996 ◽
Vol 80
(1-2)
◽
pp. 190-194
◽
Keyword(s):
2013 ◽
Vol 39
(5)
◽
pp. 5175-5184
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