Reprint of “Study of plasma immersion ion implantation inside a conducting tube using an E×B field configuration”
Keyword(s):
Study of plasma immersion ion implantation inside a conducting tube using an E×B field configuration
2014 ◽
Vol 249
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pp. 104-108
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Keyword(s):
2020 ◽
Vol 1695
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pp. 012009
2007 ◽
Vol 201
(15)
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pp. 6615-6618
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Keyword(s):
2007 ◽
Vol 50
(5-6)
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pp. 789-798
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2000 ◽
Vol 28
(5)
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pp. 1392-1396
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2009 ◽
Vol 267
(8-9)
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pp. 1696-1700
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2019 ◽
Vol 365
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pp. 173-178
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