Low temperature amorphous and nanocrystalline silicon thin film transistors deposited by Hot-Wire CVD on glass substrate

Thin Solid Films ◽

10.1016/j.tsf.2005.07.217 ◽

2006 ◽

Vol 501 (1-2) ◽

pp. 303-306 ◽

Author(s):

M. Fonrodona ◽

D. Soler ◽

J. Escarré ◽

F. Villar ◽

J. Bertomeu ◽

...

Keyword(s):

Thin Film ◽

Low Temperature ◽

Glass Substrate ◽

Thin Film Transistors ◽

Nanocrystalline Silicon ◽

Hot Wire ◽

Silicon Thin Film

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Electronic transport in low temperature nanocrystalline silicon thin-film transistors obtained by hot-wire CVD

Journal of Non-Crystalline Solids ◽

10.1016/s0022-3093(01)01015-8 ◽

2002 ◽

Vol 299-302 ◽

pp. 400-404 ◽

Author(s):

J Puigdollers ◽

C Voz ◽

A Orpella ◽

I Martı́n ◽

D Soler ◽

...

Keyword(s):

Thin Film ◽

Low Temperature ◽

Electronic Transport ◽

Thin Film Transistors ◽

Nanocrystalline Silicon ◽

Hot Wire ◽

Silicon Thin Film

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Erratum: “Controllability of self-aligned four-terminal planar embedded metal double-gate low-temperature polycrystalline-silicon thin-film transistors on a glass substrate”

Japanese Journal of Applied Physics ◽

10.7567/jjap.56.129207 ◽

2017 ◽

Vol 56 (12) ◽

pp. 129207

Author(s):

Hiroki Ohsawa ◽

Shun Sasaki ◽

Akito Hara

Keyword(s):

Thin Film ◽

Low Temperature ◽

Glass Substrate ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Double Gate ◽

Silicon Thin Film

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Impact of Silicon Nitride Gate Dielectric Composition on the Stability of Low Temperature Nanocrystalline Silicon Thin Film Transistors

ECS Transactions ◽

10.1149/1.3572276 ◽

2019 ◽

Vol 35 (4) ◽

pp. 73-79

Author(s):

Mohammad Esmaeili-Rad ◽

Gholamreza Chaji ◽

Flora Li ◽

Maryam Moradi ◽

Andrei Sazonov ◽

...

Keyword(s):

Thin Film ◽

Silicon Nitride ◽

Low Temperature ◽

Thin Film Transistors ◽

Gate Dielectric ◽

Nanocrystalline Silicon ◽

Silicon Thin Film ◽

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(Invited) Self-Aligned Four-Terminal Low-Temperature Polycrystalline-Silicon Thin-Film Transistors on Glass Substrate Using Continuous-Wave Laser Lateral Crystallization

ECS Transactions ◽

10.1149/07510.0037ecst ◽

2016 ◽

Vol 75 (10) ◽

pp. 37-47 ◽

Author(s):

A. Hara ◽

H. Ohsawa

Keyword(s):

Thin Film ◽

Low Temperature ◽

Glass Substrate ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Continuous Wave ◽

Continuous Wave Laser ◽

Silicon Thin Film ◽

Lateral Crystallization

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Self-Aligned Planar Metal Double-Gate Polycrystalline-Silicon Thin-Film Transistors Fabricated at Low Temperature on Glass Substrate

IEICE Transactions on Electronics ◽

10.1587/transele.e96.c.285 ◽

2013 ◽

Vol E96.C (2) ◽

pp. 285-288 ◽

Author(s):

Hiroyuki OGATA ◽

Kenji ICHIJO ◽

Kenji KONDO ◽

Akito HARA

Keyword(s):

Thin Film ◽

Low Temperature ◽

Glass Substrate ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Double Gate ◽

Silicon Thin Film

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Self-Aligned Metal Double-Gate Low-Temperature Polycrystalline Silicon Thin-Film Transistors on Glass Substrate Using Back-Surface Exposure

Japanese Journal of Applied Physics ◽

10.7567/jjap.50.021401 ◽

2011 ◽

Vol 50 (2R) ◽

pp. 021401 ◽

Author(s):

Akito Hara ◽

Tadashi Sato ◽

Kenji Kondo ◽

Kenta Hirose ◽

Kuninori Kitahara

Keyword(s):

Thin Film ◽

Low Temperature ◽

Glass Substrate ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Back Surface ◽

Double Gate ◽

Silicon Thin Film

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Extended-Gate pH Sensors Using Self-Aligned Four-Terminal Metal Double-Gate Low-Temperature Polycrystalline-Silicon Thin-Film Transistors on Glass Substrate

ECS Meeting Abstracts ◽

10.1149/ma2016-02/33/2154 ◽

2016 ◽

Keyword(s):

Thin Film ◽

Low Temperature ◽

Glass Substrate ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Double Gate ◽

Silicon Thin Film

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Controllability of self-aligned four-terminal planar embedded metal double-gate low-temperature polycrystalline-silicon thin-film transistors on a glass substrate

Japanese Journal of Applied Physics ◽

10.7567/jjap.55.03cc01 ◽

2016 ◽

Vol 55 (3S1) ◽

pp. 03CC01 ◽

Author(s):

Hiroki Ohsawa ◽

Shun Sasaki ◽

Akito Hara

Keyword(s):

Thin Film ◽

Low Temperature ◽

Glass Substrate ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Double Gate ◽

Silicon Thin Film

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Evaluation of pH sensors using self-aligned four-terminal planar embedded metal double-gate low-temperature polycrystalline-silicon thin-film transistors on glass substrate

2016 23rd International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD) ◽

10.1109/am-fpd.2016.7543602 ◽

2016 ◽

Author(s):

Hiroki Ohsawa ◽

Hitoshi Suzuki ◽

Satoko Kuwano ◽

Akito Hara

Keyword(s):

Thin Film ◽

Low Temperature ◽

Glass Substrate ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Double Gate ◽

Silicon Thin Film

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Extended-Gate pH Sensors Using Self-Aligned Four-Terminal Metal Double-Gate Low-Temperature Polycrystalline-Silicon Thin-Film Transistors on Glass Substrate

ECS Transactions ◽

10.1149/07510.0253ecst ◽

2016 ◽

Vol 75 (10) ◽

pp. 253-260

Author(s):

H. Ohsawa ◽

A. Hara

Keyword(s):

Thin Film ◽

Low Temperature ◽

Glass Substrate ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Double Gate ◽

Silicon Thin Film

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