scholarly journals Anisotropic Single-Crystal Silicon Etching in High-Density RFIC Plasma with High Aspect Ratio and High Selectivity

1996 ◽  
Author(s):  
T. Pandhumsoporn ◽  
K. Yu
Keyword(s):  
Aspect Ratio ◽  
Single Crystal ◽  
High Aspect Ratio ◽  
High Selectivity ◽  
Single Crystal Silicon ◽  
High Density ◽  
Silicon Etching ◽  
Crystal Silicon

Fabrication of high aspect ratio self-aligned stepped polysilicon electrode for single-crystal silicon microstructure

2015 ◽  
Vol 23 (5) ◽  
pp. 1319-1325 ◽  
Author(s):  
Weilong You ◽  
Lei Zhang ◽  
Xiaofei Wang ◽  
Wenshan Wei ◽  
Weifeng Xia ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
Single Crystal ◽  
High Aspect Ratio ◽  
Single Crystal Silicon ◽  
Crystal Silicon
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