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Reactive direct current magnetron sputtering of tungsten oxide: A correlation between film properties and deposition pressure
Thin Solid Films
◽
10.1016/j.tsf.2006.05.005
◽
2006
◽
Vol 515
(4)
◽
pp. 2760-2764
◽
Cited By ~ 9
Author(s):
Christian Salinga
◽
Oliver Kappertz
◽
Matthias Wuttig
Keyword(s):
Magnetron Sputtering
◽
Tungsten Oxide
◽
Direct Current
◽
Deposition Pressure
◽
Film Properties
◽
Direct Current Magnetron Sputtering
Download Full-text
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References
Coloring and Bleaching Properties of 500–1000‐nm‐Thick Electrochromic Tungsten Oxide Films Deposited by Reactive Direct Current Magnetron Sputtering
physica status solidi (a)
◽
10.1002/pssa.202100646
◽
2021
◽
Author(s):
Md. Suruz Mian
◽
Riko Yagi
◽
Kei Oya
◽
Takeo Nakano
Keyword(s):
Magnetron Sputtering
◽
Tungsten Oxide
◽
Direct Current
◽
Oxide Films
◽
Direct Current Magnetron Sputtering
Download Full-text
Deposition and corrosion behavior of -oriented vanadium thick films by direct current magnetron sputtering
Thin Solid Films
◽
10.1016/j.tsf.2020.138491
◽
2020
◽
pp. 138491
Author(s):
Song Zhang
◽
Wenhua Xu
◽
Jun Li
◽
Rong Tu
Keyword(s):
Magnetron Sputtering
◽
Corrosion Behavior
◽
Direct Current
◽
Thick Films
◽
Direct Current Magnetron Sputtering
Download Full-text
The growth of a multi-principal element (CoCrFeMnNi) oxynitride film by direct current magnetron sputtering using air as reactive gas
Surface and Coatings Technology
◽
10.1016/j.surfcoat.2021.127433
◽
2021
◽
pp. 127433
Author(s):
G. Radnóczi
◽
R. Dedoncker
◽
G.Z. Radnóczi
◽
Zs. Czigány
◽
A. Sulyok
◽
...
Keyword(s):
Magnetron Sputtering
◽
Direct Current
◽
Principal Element
◽
Direct Current Magnetron Sputtering
◽
Oxynitride Film
◽
Reactive Gas
Download Full-text
ZrCuAlNi thin film metallic glass grown by high power impulse and direct current magnetron sputtering
Surface and Coatings Technology
◽
10.1016/j.surfcoat.2021.127029
◽
2021
◽
pp. 127029
Author(s):
Niklas Bönninghoff
◽
Wahyu Diyatmika
◽
Jinn P. Chu
◽
Stanislav Mráz
◽
Jochen M. Schneider
◽
...
Keyword(s):
Thin Film
◽
Metallic Glass
◽
Magnetron Sputtering
◽
Direct Current
◽
High Power
◽
Direct Current Magnetron Sputtering
Download Full-text
Synthesis and characterization of Cu3N–WC nanocomposite films prepared by direct current magnetron sputtering
Thin Solid Films
◽
10.1016/j.tsf.2010.05.053
◽
2010
◽
Vol 518
(18)
◽
pp. 5227-5232
◽
Cited By ~ 7
Author(s):
Shihong Zhang
◽
Yinsheng He
◽
Mingxi Li
◽
Yizhu He
◽
Sikchol Kwon
◽
...
Keyword(s):
Magnetron Sputtering
◽
Direct Current
◽
Nanocomposite Films
◽
Synthesis And Characterization
◽
Direct Current Magnetron Sputtering
Download Full-text
Tungsten-doped ZnO transparent conducting films deposited by direct current magnetron sputtering
Vacuum
◽
10.1016/j.vacuum.2010.05.010
◽
2010
◽
Vol 85
(2)
◽
pp. 184-186
◽
Cited By ~ 16
Author(s):
Huafu Zhang
◽
Hanfa Liu
◽
Chengxin Lei
◽
Changkun Yuan
◽
Aiping Zhou
Keyword(s):
Magnetron Sputtering
◽
Direct Current
◽
Transparent Conducting Films
◽
Transparent Conducting
◽
Direct Current Magnetron Sputtering
◽
Doped Zno
Download Full-text
Compositional dependence of stress in silver copper alloys prepared by direct current magnetron sputtering
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
◽
10.1116/1.577799
◽
1992
◽
Vol 10
(6)
◽
pp. 3439-3444
◽
Cited By ~ 1
Author(s):
A. M. Kazakos
◽
D. E. Fahnline
◽
R. Messier
◽
L. J. Pilione
Keyword(s):
Magnetron Sputtering
◽
Direct Current
◽
Copper Alloys
◽
Compositional Dependence
◽
Silver Copper
◽
Direct Current Magnetron Sputtering
Download Full-text
Synthesis and Characterization of Molybdenum Back Contact Using Direct Current-Magnetron Sputtering for Thin Film Solar Cells
Frontiers in Materials
◽
10.3389/fmats.2018.00013
◽
2018
◽
Vol 5
◽
Cited By ~ 2
Author(s):
Subhash M. Pandharkar
◽
Sachin R. Rondiya
◽
Avinash V. Rokade
◽
Bharat B. Gabhale
◽
Habib M. Pathan
◽
...
Keyword(s):
Thin Film
◽
Solar Cells
◽
Magnetron Sputtering
◽
Direct Current
◽
Thin Film Solar Cells
◽
Synthesis And Characterization
◽
Back Contact
◽
Direct Current Magnetron Sputtering
Download Full-text
Effect of reflected Ar neutrals on tantalum diboride coatings prepared by direct current magnetron sputtering
Surface and Coatings Technology
◽
10.1016/j.surfcoat.2021.127463
◽
2021
◽
pp. 127463
Author(s):
K. Viskupová
◽
B. Grančič
◽
T. Roch
◽
L. Satrapinskyy
◽
M. Truchlý
◽
...
Keyword(s):
Magnetron Sputtering
◽
Direct Current
◽
Direct Current Magnetron Sputtering
Download Full-text
Effect of modulation period on structure and mechanical properties of WB2/a-WBC films deposited by direct-current magnetron sputtering
Thin Solid Films
◽
10.1016/j.tsf.2021.138994
◽
2021
◽
pp. 138994
Author(s):
Yanming Liu
◽
Xingxing Zhao
◽
Li Tian
◽
Chen Wang
◽
Zhiliang Pei
Keyword(s):
Mechanical Properties
◽
Magnetron Sputtering
◽
Direct Current
◽
Modulation Period
◽
Direct Current Magnetron Sputtering
Download Full-text
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