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Stress measurement in thin films with the ion beam layer removal method: Influence of experimental errors and parameters
Thin Solid Films
◽
10.1016/j.tsf.2008.06.091
◽
2008
◽
Vol 516
(23)
◽
pp. 8655-8662
◽
Cited By ~ 10
Author(s):
S. Massl
◽
H. Köstenbauer
◽
J. Keckes
◽
R. Pippan
Keyword(s):
Thin Films
◽
Stress Measurement
◽
Ion Beam
◽
Removal Method
◽
Layer Removal
◽
Layer Removal Method
◽
Experimental Errors
Download Full-text
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References
Evaluation of the residual stress distribution in thin films by means of the ion beam layer removal method
2014 15th International Conference on Thermal, Mechanical and Mulit-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)
◽
10.1109/eurosime.2014.6813785
◽
2014
◽
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Author(s):
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◽
Ruth Treml
◽
Ronald Schongrundner
◽
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◽
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◽
...
Keyword(s):
Thin Films
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Residual Stress
◽
Stress Distribution
◽
Ion Beam
◽
Residual Stress Distribution
◽
Removal Method
◽
Layer Removal
◽
Layer Removal Method
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Critical assessment of the determination of residual stress profiles in thin films by means of the ion beam layer removal method
Thin Solid Films
◽
10.1016/j.tsf.2014.06.003
◽
2014
◽
Vol 564
◽
pp. 321-330
◽
Cited By ~ 38
Author(s):
R. Schöngrundner
◽
R. Treml
◽
T. Antretter
◽
D. Kozic
◽
W. Ecker
◽
...
Keyword(s):
Thin Films
◽
Residual Stress
◽
Ion Beam
◽
Critical Assessment
◽
Removal Method
◽
Layer Removal
◽
Layer Removal Method
◽
Stress Profiles
Download Full-text
An ion beam layer removal method of determining the residual stress in the as-fabricated TSV-Cu/TiW/SiO2/Si interface on a nanoscale
Microelectronics Reliability
◽
10.1016/j.microrel.2020.113826
◽
2020
◽
Vol 112
◽
pp. 113826
Author(s):
S. Chen
◽
Y.F. En
◽
G.Y. Li
◽
Z.Z. Wang
◽
R. Gao
◽
...
Keyword(s):
Residual Stress
◽
Ion Beam
◽
Removal Method
◽
Layer Removal
◽
Layer Removal Method
Download Full-text
A modified layer-removal method for residual stress measurement in electrodeposited nickel films
Thin Solid Films
◽
10.1016/j.tsf.2011.01.260
◽
2011
◽
Vol 519
(10)
◽
pp. 3249-3253
◽
Cited By ~ 8
Author(s):
L.M. Jiang
◽
J. Peng
◽
Y.G. Liao
◽
Y.C. Zhou
◽
J. Liang
◽
...
Keyword(s):
Residual Stress
◽
Stress Measurement
◽
Residual Stress Measurement
◽
Nickel Films
◽
Removal Method
◽
Layer Removal
◽
Layer Removal Method
◽
Electrodeposited Nickel
◽
Modified Layer
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Examination of the computational model for the layer-removal method for residual-stress measurement
Experimental Mechanics
◽
10.1007/bf02320007
◽
1986
◽
Vol 26
(2)
◽
pp. 150-153
◽
Cited By ~ 11
Author(s):
W. Cheng
◽
I. Finnie
Keyword(s):
Residual Stress
◽
Computational Model
◽
Stress Measurement
◽
Residual Stress Measurement
◽
Removal Method
◽
Layer Removal
◽
Layer Removal Method
Download Full-text
Cross-sectional stress distribution in Al x Ga 1-x N heterostructure on Si(111) substrate characterized by ion beam layer removal method and precession electron diffraction
Materials & Design
◽
10.1016/j.matdes.2016.06.001
◽
2016
◽
Vol 106
◽
pp. 476-481
◽
Cited By ~ 9
Author(s):
M. Reisinger
◽
J. Zalesak
◽
R. Daniel
◽
M. Tomberger
◽
J.K. Weiss
◽
...
Keyword(s):
Electron Diffraction
◽
Stress Distribution
◽
Ion Beam
◽
Cross Sectional
◽
Removal Method
◽
Layer Removal
◽
Precession Electron Diffraction
◽
Layer Removal Method
Download Full-text
Surface residual stress measurements by layer removal method
International Journal of Machining and Machinability of Materials
◽
10.1504/ijmmm.2014.067307
◽
2014
◽
Vol 16
(3/4)
◽
pp. 187
◽
Cited By ~ 3
Author(s):
Yury I. Zamashchikov
Keyword(s):
Residual Stress
◽
Surface Residual Stress
◽
Removal Method
◽
Stress Measurements
◽
Layer Removal
◽
Layer Removal Method
Download Full-text
Through-thickness residual stress evaluations for several industrial thermal spray coatings using a modified layer-removal method
Journal of Thermal Spray Technology
◽
10.1007/bf02658983
◽
1994
◽
Vol 3
(4)
◽
pp. 379-388
◽
Cited By ~ 62
Author(s):
D. J. Greving
◽
E. F. Rybicki
◽
J. R. Shadley
Keyword(s):
Residual Stress
◽
Thermal Spray
◽
Thermal Spray Coatings
◽
Removal Method
◽
Layer Removal
◽
Spray Coatings
◽
Layer Removal Method
◽
Modified Layer
Download Full-text
Research on Residual Stress Measurement Technology of Aluminum Alloy Plate Based on Modified Layer Removal Method
2009 First International Conference on Information Science and Engineering
◽
10.1109/icise.2009.987
◽
2009
◽
Cited By ~ 2
Author(s):
Hai Gong
◽
Yunxin Wu
◽
Liao Kai
Keyword(s):
Residual Stress
◽
Aluminum Alloy
◽
Stress Measurement
◽
Residual Stress Measurement
◽
Measurement Technology
◽
Alloy Plate
◽
Removal Method
◽
Layer Removal Method
◽
Aluminum Alloy Plate
◽
Modified Layer
Download Full-text
Residual stress measurement in thin films at sub-micron scale using Focused Ion Beam milling and imaging
Thin Solid Films
◽
10.1016/j.tsf.2011.10.211
◽
2012
◽
Vol 520
(6)
◽
pp. 2073-2076
◽
Cited By ~ 29
Author(s):
Xu Song
◽
Kong Boon Yeap
◽
Jing Zhu
◽
Jonathan Belnoue
◽
Marco Sebastiani
◽
...
Keyword(s):
Thin Films
◽
Residual Stress
◽
Focused Ion Beam
◽
Stress Measurement
◽
Ion Beam
◽
Residual Stress Measurement
◽
Focused Ion Beam Milling
Download Full-text
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