Effects of post-deposition surface treatment on the optical, structural and hydrogen sensing properties of TiO2 thin films

2009 ◽  
Vol 518 (4) ◽  
pp. 1103-1108 ◽  
Author(s):  
I. Fasaki ◽  
I. Hotovy ◽  
A. Rehakova ◽  
J. Hotovy ◽  
V. Rehacek ◽  
...  
Open Physics ◽  
2011 ◽  
Vol 9 (5) ◽  
Author(s):  
Azhar Haidry ◽  
Peter Schlosser ◽  
Pavol Durina ◽  
Marian Mikula ◽  
Milan Tomasek ◽  
...  

AbstractTitanium dioxide thin films are extensively studied for applications in solid state gas sensor devices. Their gas sensing properties are strongly dependent on deposition technique, annealing temperature, film thickness and consequent properties like crystalline structure, grain size or amount of defects and impurities. In this work we report the gas sensing properties of TiO2 thin films prepared by reactive magnetron sputtering technique and subsequently annealed at temperatures 600°C and 900°C. The films were exposed to different concentrations of H2 gas up to 10 000 ppm. Their sensitivity to gas at various operating temperatures, ranging from 250°C to 450°C, was obtained by measuring their resistance.


2017 ◽  
Vol 29 (1) ◽  
pp. 467-473 ◽  
Author(s):  
Miguel H. Boratto ◽  
Roberto A. Ramos ◽  
Luis V. A. Scalvi

2009 ◽  
Vol 518 (4) ◽  
pp. 1109-1113 ◽  
Author(s):  
I. Fasaki ◽  
M. Suchea ◽  
G. Mousdis ◽  
G. Kiriakidis ◽  
M. Kompitsas

2010 ◽  
Vol 6 (1) ◽  
pp. 31-34 ◽  
Author(s):  
Hi Gyu Moon ◽  
Ho Won Jang ◽  
Jin-Sang Kim ◽  
Hyung-Ho Park ◽  
Seok-Jin Yoon

Author(s):  
Damian Wojcieszak ◽  
Agata Obstarczyk ◽  
Ewa Mańkowska ◽  
Michał Mazur ◽  
Danuta Kaczmarek ◽  
...  

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