Comparative study of annealing and oxidation effects in a-SiC:H and a-SiC thin films deposited by radio-frequency magnetron sputtering

2011 ◽  
Vol 519 (7) ◽  
pp. 2218-2224 ◽  
Author(s):  
A.V. Vasin ◽  
Sh. Muto ◽  
Yu. Ishikawa ◽  
A.V. Rusavsky ◽  
T. Kimura ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Comparative Study ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering

Structural and optical properties of CdSe0.2Te0.8 thin films prepared by radio frequency magnetron sputtering

2021 ◽  
Vol 288 ◽  
pp. 129320
Author(s):  
Guangqiang He ◽  
Zhihui Xiong ◽  
Hui Yang ◽  
Ming Yang ◽  
Zhixi Li ◽  
...  
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Structural And Optical Properties

Nitrogen Doping into Cu2O Thin Films Deposited by Reactive Radio-Frequency Magnetron Sputtering

2001 ◽  
Vol 40 (Part 1, No. 4B) ◽  
pp. 2765-2768 ◽  
Author(s):  
Shogo Ishizuka ◽  
Shinya Kato ◽  
Takahiro Maruyama ◽  
Katsuhiro Akimoto
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Nitrogen Doping ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Cu2o Thin Films

Structures and properties of the Al-doped ZnO thin films prepared by radio frequency magnetron sputtering

2011 ◽  
Vol 519 (16) ◽  
pp. 5577-5581 ◽  
Author(s):  
Hongyun Yue ◽  
Aimin Wu ◽  
Yudong Feng ◽  
Xueyu Zhang ◽  
Tingju Li
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Zno Thin Films ◽  
Radio Frequency Magnetron Sputtering ◽  
Structures And Properties ◽  
Doped Zno

scholarly journals Radio frequency magnetron sputtering of Li7La3Zr2O12 thin films for solid-state batteries

2016 ◽  
Vol 307 ◽  
pp. 684-689 ◽  
Author(s):  
S. Lobe ◽  
C. Dellen ◽  
M. Finsterbusch ◽  
H.-G. Gehrke ◽  
D. Sebold ◽  
...  
Keyword(s):  
Thin Films ◽  
Solid State ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Solid State Batteries

Epitaxial growth of ZnO thin films on R-plane sapphire substrate by radio frequency magnetron sputtering

1997 ◽  
Vol 15 (3) ◽  
pp. 1103-1107 ◽  
Author(s):  
Young Jin Kim ◽  
Yoo Taek Kim ◽  
Hyung Kook Yang ◽  
Jong Chul Park ◽  
Jung In Han ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Epitaxial Growth ◽  
Sapphire Substrate ◽  
Radio Frequency Magnetron ◽  
Zno Thin Films ◽  
Radio Frequency Magnetron Sputtering

scholarly journals Preparation of LaFeO3 Perovskite Thin Films by Radio Frequency Magnetron Sputtering and Their Electrical Conductivities

2001 ◽  
Vol 69 (3) ◽  
pp. 171-176 ◽  
Author(s):  
Satoshi YAMADA ◽  
Hideo TAI ◽  
Yasumichi MATSUMOTO ◽  
Michio KOINUMA ◽  
Kai KAMADA ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Electrical Conductivities
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