scholarly journals Comparison of optical properties of TiO2 thin films prepared by reactive magnetron sputtering and electron-beam evaporation techniques

2011 ◽  
Vol 14 (4) ◽  
pp. 427-431 ◽  
Author(s):  
V. V. Brus ◽  
◽  
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Electron Beam ◽  
Magnetron Sputtering ◽  
Electron Beam Evaporation ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Tio2 Thin Films

Microstructure and optical properties of TiO2 thin films prepared by low pressure hot target reactive magnetron sputtering

2006 ◽  
Vol 513 (1-2) ◽  
pp. 269-274 ◽  
Author(s):  
J. Domaradzki ◽  
D. Kaczmarek ◽  
E.L. Prociow ◽  
A. Borkowska ◽  
D. Schmeisser ◽  
...  
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Magnetron Sputtering ◽  
Low Pressure ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Tio2 Thin Films ◽  
Hot Target
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