Real-time estimation of growth rate and surface roughness in thin film growth using kinetic monte-carlo models

2003 ◽  
pp. 1199-1204
Author(s):  
Yiming Lou ◽  
Panagiotis D. Christofides
Keyword(s):  
Thin Film ◽  
Growth Rate ◽  
Surface Roughness ◽  
Monte Carlo ◽  
Real Time ◽  
Film Growth ◽  
Kinetic Monte Carlo ◽  
Time Estimation ◽  
Thin Film Growth ◽  
Real Time Estimation

Kinetic Monte Carlo simulation of Cu thin film growth

Vacuum ◽  
2004 ◽  
Vol 72 (4) ◽  
pp. 405-410 ◽  
Author(s):  
Peifeng Zhang ◽  
Xiaoping Zheng ◽  
Suoping Wu ◽  
Jun Liu ◽  
Deyan He
Keyword(s):  
Thin Film ◽  
Monte Carlo Simulation ◽  
Monte Carlo ◽  
Film Growth ◽  
Kinetic Monte Carlo ◽  
Thin Film Growth ◽  
Kinetic Monte Carlo Simulation ◽  
Cu Thin Film
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