This paper deals with fabrication and characterization of liquid flow sensor based on electrokinetic effect – streaming potential. The possibility of using silicon microchannel membrane as a sensing element of the sensor has been demonstrated. Electric response of the sensor has been determined by passing deionized water through the membrane. A linear dependence of the operating characteristic has been found. Sensitivity and performance of the electrokinetic device have been evaluated. The optimal design of the liquid flow sensor has been proposed