Low power, MEMS liquid flow sensor with silicone coating electrical insulation

Author(s):  
Alessia Di Pancrazio ◽  
Paolo Bruschi ◽  
Massimo Piotto
2021 ◽  
pp. 1-1
Author(s):  
Zhenyu Yuan ◽  
Fan Yang ◽  
Fanli Meng ◽  
Kaiyuan Zuo ◽  
Jin Li
Keyword(s):  

Proceedings ◽  
2019 ◽  
Vol 14 (1) ◽  
pp. 9
Author(s):  
Yoshinori Nishiue

The semiconductor type sensor developed by New Cosmos is a very unique sensor depending on its principle and structure.[...]


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